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- W2019960455 abstract "This paper presents results from an ongoing three-year project in which the use of microcavities to getter transition metal impurities in silicon-based microelectronic devices has been investigated. The paper reports on the results of a fundamental study of bubble growth mechanisms and on a systematic study of possible detrimental effects of cavity gettering on 1.2 μm p-type metal–oxide-semiconductor field effect transistors." @default.
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- W2019960455 date "2003-05-01" @default.
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- W2019960455 title "The use of cavities for gettering in silicon microelectronic devices" @default.
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