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- W2019962309 abstract "In order to increase plasma etch selectivity in traditional single layer organic resists SiO<SUB>2</SUB> nanoparticles have been added to typical 248nm resist formulations. Formulation modifications are necessary due to the dissolution acceleration effect of the particles. Surface functionalization of the nanoparticle surfaces with organic groups lessens this effect and allows the inclusion of acid labile groups. This allows for a wider formulation window and limits unexposed film thickness losses (UFTL). Both t- butyl ester groups and poly(t-butyl acrylate) have been used to achieve this effect. Encapsulated inorganic resist technology (EIRT) can be used as a single layer hard mask compatible with existing resist processing steps and replace complex and costly multilevel resist approaches. Lithogrpahic evaluations have been performed with electron beam, and with 248nm and 157nm projection systems. Greater transparency at 157nm is achieved by the addition of these materials, thus enabling the use of thicker films. High resolution imaging is demonstrated at these wavelengths." @default.
- W2019962309 created "2016-06-24" @default.
- W2019962309 creator A5028032298 @default.
- W2019962309 creator A5039128869 @default.
- W2019962309 creator A5040181216 @default.
- W2019962309 creator A5045037805 @default.
- W2019962309 creator A5052303577 @default.
- W2019962309 creator A5077761178 @default.
- W2019962309 creator A5080988823 @default.
- W2019962309 date "2001-08-24" @default.
- W2019962309 modified "2023-09-27" @default.
- W2019962309 title "Encapsulated inorganic resist technology applied to 157-nm lithography" @default.
- W2019962309 doi "https://doi.org/10.1117/12.436860" @default.
- W2019962309 hasPublicationYear "2001" @default.
- W2019962309 type Work @default.
- W2019962309 sameAs 2019962309 @default.
- W2019962309 citedByCount "4" @default.
- W2019962309 crossrefType "proceedings-article" @default.
- W2019962309 hasAuthorship W2019962309A5028032298 @default.
- W2019962309 hasAuthorship W2019962309A5039128869 @default.
- W2019962309 hasAuthorship W2019962309A5040181216 @default.
- W2019962309 hasAuthorship W2019962309A5045037805 @default.
- W2019962309 hasAuthorship W2019962309A5052303577 @default.
- W2019962309 hasAuthorship W2019962309A5077761178 @default.
- W2019962309 hasAuthorship W2019962309A5080988823 @default.
- W2019962309 hasConcept C127413603 @default.
- W2019962309 hasConcept C134406635 @default.
- W2019962309 hasConcept C155672457 @default.
- W2019962309 hasConcept C171250308 @default.
- W2019962309 hasConcept C192562407 @default.
- W2019962309 hasConcept C200274948 @default.
- W2019962309 hasConcept C204223013 @default.
- W2019962309 hasConcept C2779227376 @default.
- W2019962309 hasConcept C42360764 @default.
- W2019962309 hasConcept C49040817 @default.
- W2019962309 hasConcept C53524968 @default.
- W2019962309 hasConcept C88380143 @default.
- W2019962309 hasConceptScore W2019962309C127413603 @default.
- W2019962309 hasConceptScore W2019962309C134406635 @default.
- W2019962309 hasConceptScore W2019962309C155672457 @default.
- W2019962309 hasConceptScore W2019962309C171250308 @default.
- W2019962309 hasConceptScore W2019962309C192562407 @default.
- W2019962309 hasConceptScore W2019962309C200274948 @default.
- W2019962309 hasConceptScore W2019962309C204223013 @default.
- W2019962309 hasConceptScore W2019962309C2779227376 @default.
- W2019962309 hasConceptScore W2019962309C42360764 @default.
- W2019962309 hasConceptScore W2019962309C49040817 @default.
- W2019962309 hasConceptScore W2019962309C53524968 @default.
- W2019962309 hasConceptScore W2019962309C88380143 @default.
- W2019962309 hasLocation W20199623091 @default.
- W2019962309 hasOpenAccess W2019962309 @default.
- W2019962309 hasPrimaryLocation W20199623091 @default.
- W2019962309 hasRelatedWork W1972916030 @default.
- W2019962309 hasRelatedWork W1982452378 @default.
- W2019962309 hasRelatedWork W2043777656 @default.
- W2019962309 hasRelatedWork W2083743899 @default.
- W2019962309 hasRelatedWork W2089746739 @default.
- W2019962309 hasRelatedWork W2135899712 @default.
- W2019962309 hasRelatedWork W2306672908 @default.
- W2019962309 hasRelatedWork W3007549791 @default.
- W2019962309 hasRelatedWork W1965928302 @default.
- W2019962309 hasRelatedWork W2018780667 @default.
- W2019962309 isParatext "false" @default.
- W2019962309 isRetracted "false" @default.
- W2019962309 magId "2019962309" @default.
- W2019962309 workType "article" @default.