FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2019985493> ?p ?o ?g. }

• W2019985493 endingPage "28" @default.
• W2019985493 startingPage "22" @default.
• W2019985493 abstract "Effect of substrate temperatures has been studied for the deposition of tantalum oxide films by ArF excimer laser ablation. Orthorhombic tantalum pentaoxide film (β-Ta 2 O 5 ) were formed at substrate temperatures above 650°C. Small grains of β-Ta 2 O 5 deposited densely on the film obtained at 700°C. Surface roughness of the films increased with raising substrate temperatures." @default.
• W2019985493 created "2016-06-24" @default.
• W2019985493 creator A5035412340 @default.
• W2019985493 creator A5062934675 @default.
• W2019985493 creator A5073210962 @default.
• W2019985493 creator A5074885245 @default.
• W2019985493 creator A5085451062 @default.
• W2019985493 date "1998-10-01" @default.
• W2019985493 modified "2023-09-27" @default.
• W2019985493 title "Deposition of tantalum oxide films by ArF excimer laser ablation" @default.
• W2019985493 cites W1964041370 @default.
• W2019985493 cites W1965998195 @default.
• W2019985493 cites W1974965979 @default.
• W2019985493 cites W1976638927 @default.
• W2019985493 cites W1993882901 @default.
• W2019985493 cites W2003577653 @default.
• W2019985493 cites W2006261884 @default.
• W2019985493 cites W2009119885 @default.
• W2019985493 cites W2044039359 @default.
• W2019985493 cites W2058403437 @default.
• W2019985493 cites W2069182745 @default.
• W2019985493 cites W2069601282 @default.
• W2019985493 cites W2074212325 @default.
• W2019985493 cites W2098741288 @default.
• W2019985493 cites W2575246823 @default.
• W2019985493 doi "https://doi.org/10.1016/s0169-4332(98)00332-8" @default.
• W2019985493 hasPublicationYear "1998" @default.
• W2019985493 type Work @default.
• W2019985493 sameAs 2019985493 @default.
• W2019985493 citedByCount "18" @default.
• W2019985493 countsByYear W20199854932014 @default.
• W2019985493 countsByYear W20199854932017 @default.
• W2019985493 countsByYear W20199854932021 @default.
• W2019985493 crossrefType "journal-article" @default.
• W2019985493 hasAuthorship W2019985493A5035412340 @default.
• W2019985493 hasAuthorship W2019985493A5062934675 @default.
• W2019985493 hasAuthorship W2019985493A5073210962 @default.
• W2019985493 hasAuthorship W2019985493A5074885245 @default.
• W2019985493 hasAuthorship W2019985493A5085451062 @default.
• W2019985493 hasConcept C111368507 @default.
• W2019985493 hasConcept C115624301 @default.
• W2019985493 hasConcept C120665830 @default.
• W2019985493 hasConcept C121332964 @default.
• W2019985493 hasConcept C127313418 @default.
• W2019985493 hasConcept C127413603 @default.
• W2019985493 hasConcept C146978453 @default.
• W2019985493 hasConcept C151730666 @default.
• W2019985493 hasConcept C171250308 @default.
• W2019985493 hasConcept C185592680 @default.
• W2019985493 hasConcept C19067145 @default.
• W2019985493 hasConcept C191897082 @default.
• W2019985493 hasConcept C192562407 @default.
• W2019985493 hasConcept C2777289219 @default.
• W2019985493 hasConcept C2778902805 @default.
• W2019985493 hasConcept C2779188808 @default.
• W2019985493 hasConcept C2779851234 @default.
• W2019985493 hasConcept C2780477314 @default.
• W2019985493 hasConcept C2816523 @default.
• W2019985493 hasConcept C37243968 @default.
• W2019985493 hasConcept C37982897 @default.
• W2019985493 hasConcept C514619126 @default.
• W2019985493 hasConcept C520434653 @default.
• W2019985493 hasConcept C64297162 @default.
• W2019985493 hasConcept C71039073 @default.
• W2019985493 hasConcept C8010536 @default.
• W2019985493 hasConcept C86803240 @default.
• W2019985493 hasConceptScore W2019985493C111368507 @default.
• W2019985493 hasConceptScore W2019985493C115624301 @default.
• W2019985493 hasConceptScore W2019985493C120665830 @default.
• W2019985493 hasConceptScore W2019985493C121332964 @default.
• W2019985493 hasConceptScore W2019985493C127313418 @default.
• W2019985493 hasConceptScore W2019985493C127413603 @default.
• W2019985493 hasConceptScore W2019985493C146978453 @default.
• W2019985493 hasConceptScore W2019985493C151730666 @default.
• W2019985493 hasConceptScore W2019985493C171250308 @default.
• W2019985493 hasConceptScore W2019985493C185592680 @default.
• W2019985493 hasConceptScore W2019985493C19067145 @default.
• W2019985493 hasConceptScore W2019985493C191897082 @default.
• W2019985493 hasConceptScore W2019985493C192562407 @default.
• W2019985493 hasConceptScore W2019985493C2777289219 @default.
• W2019985493 hasConceptScore W2019985493C2778902805 @default.
• W2019985493 hasConceptScore W2019985493C2779188808 @default.
• W2019985493 hasConceptScore W2019985493C2779851234 @default.
• W2019985493 hasConceptScore W2019985493C2780477314 @default.
• W2019985493 hasConceptScore W2019985493C2816523 @default.
• W2019985493 hasConceptScore W2019985493C37243968 @default.
• W2019985493 hasConceptScore W2019985493C37982897 @default.
• W2019985493 hasConceptScore W2019985493C514619126 @default.
• W2019985493 hasConceptScore W2019985493C520434653 @default.
• W2019985493 hasConceptScore W2019985493C64297162 @default.
• W2019985493 hasConceptScore W2019985493C71039073 @default.
• W2019985493 hasConceptScore W2019985493C8010536 @default.
• W2019985493 hasConceptScore W2019985493C86803240 @default.
• W2019985493 hasIssue "1-2" @default.
• W2019985493 hasLocation W20199854931 @default.
• W2019985493 hasOpenAccess W2019985493 @default.
• W2019985493 hasPrimaryLocation W20199854931 @default.
• W2019985493 hasRelatedWork W1779249657 @default.

• next