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- W2020002995 abstract "A double patterning process is presented to pattern sub-35 nm wide channels in hydrogen silsesquioxane with near 100% pattern densities. Using aligned electron beam lithography, each side of the nanochannel structure is patterned as a separate layer. A 50 000 μC/cm2 high-dose anneal is applied to the first layer after exposure and develop to densify the structure and improve resistance to subsequent chemical exposure. Channels with widths below ∼60 nm are shown to exhibit footing with standard tetramethyl ammonium hydroxide developers. This problem is resolved by adding surfactant during the development of the final channel structure. The resulting process produced channels <35 nm wide with smooth sidewalls and a height of 45 nm." @default.
- W2020002995 created "2016-06-24" @default.
- W2020002995 creator A5004265091 @default.
- W2020002995 creator A5057089788 @default.
- W2020002995 creator A5084096388 @default.
- W2020002995 date "2015-01-28" @default.
- W2020002995 modified "2023-10-16" @default.
- W2020002995 title "Nanochannel fabrication based on double patterning with hydrogen silsesquioxane" @default.
- W2020002995 cites W1972334828 @default.
- W2020002995 cites W1974171422 @default.
- W2020002995 cites W1989220190 @default.
- W2020002995 cites W1989600325 @default.
- W2020002995 cites W2003997952 @default.
- W2020002995 cites W2026201230 @default.
- W2020002995 cites W2032262202 @default.
- W2020002995 cites W2061124067 @default.
- W2020002995 cites W2061391218 @default.
- W2020002995 cites W2070548645 @default.
- W2020002995 cites W2071117045 @default.
- W2020002995 cites W2079513697 @default.
- W2020002995 cites W2106843392 @default.
- W2020002995 cites W2166743285 @default.
- W2020002995 doi "https://doi.org/10.1116/1.4906486" @default.
- W2020002995 hasPublicationYear "2015" @default.
- W2020002995 type Work @default.
- W2020002995 sameAs 2020002995 @default.
- W2020002995 citedByCount "0" @default.
- W2020002995 crossrefType "journal-article" @default.
- W2020002995 hasAuthorship W2020002995A5004265091 @default.
- W2020002995 hasAuthorship W2020002995A5057089788 @default.
- W2020002995 hasAuthorship W2020002995A5084096388 @default.
- W2020002995 hasConcept C127413603 @default.
- W2020002995 hasConcept C136525101 @default.
- W2020002995 hasConcept C142724271 @default.
- W2020002995 hasConcept C159985019 @default.
- W2020002995 hasConcept C171250308 @default.
- W2020002995 hasConcept C192562407 @default.
- W2020002995 hasConcept C200274948 @default.
- W2020002995 hasConcept C204223013 @default.
- W2020002995 hasConcept C204787440 @default.
- W2020002995 hasConcept C2775896084 @default.
- W2020002995 hasConcept C2777879272 @default.
- W2020002995 hasConcept C2778339742 @default.
- W2020002995 hasConcept C2779063765 @default.
- W2020002995 hasConcept C2779227376 @default.
- W2020002995 hasConcept C42360764 @default.
- W2020002995 hasConcept C49040817 @default.
- W2020002995 hasConcept C521977710 @default.
- W2020002995 hasConcept C53524968 @default.
- W2020002995 hasConcept C71924100 @default.
- W2020002995 hasConceptScore W2020002995C127413603 @default.
- W2020002995 hasConceptScore W2020002995C136525101 @default.
- W2020002995 hasConceptScore W2020002995C142724271 @default.
- W2020002995 hasConceptScore W2020002995C159985019 @default.
- W2020002995 hasConceptScore W2020002995C171250308 @default.
- W2020002995 hasConceptScore W2020002995C192562407 @default.
- W2020002995 hasConceptScore W2020002995C200274948 @default.
- W2020002995 hasConceptScore W2020002995C204223013 @default.
- W2020002995 hasConceptScore W2020002995C204787440 @default.
- W2020002995 hasConceptScore W2020002995C2775896084 @default.
- W2020002995 hasConceptScore W2020002995C2777879272 @default.
- W2020002995 hasConceptScore W2020002995C2778339742 @default.
- W2020002995 hasConceptScore W2020002995C2779063765 @default.
- W2020002995 hasConceptScore W2020002995C2779227376 @default.
- W2020002995 hasConceptScore W2020002995C42360764 @default.
- W2020002995 hasConceptScore W2020002995C49040817 @default.
- W2020002995 hasConceptScore W2020002995C521977710 @default.
- W2020002995 hasConceptScore W2020002995C53524968 @default.
- W2020002995 hasConceptScore W2020002995C71924100 @default.
- W2020002995 hasIssue "2" @default.
- W2020002995 hasLocation W20200029951 @default.
- W2020002995 hasOpenAccess W2020002995 @default.
- W2020002995 hasPrimaryLocation W20200029951 @default.
- W2020002995 hasRelatedWork W1987405497 @default.
- W2020002995 hasRelatedWork W2014828324 @default.
- W2020002995 hasRelatedWork W2026197969 @default.
- W2020002995 hasRelatedWork W2060654441 @default.
- W2020002995 hasRelatedWork W2070117281 @default.
- W2020002995 hasRelatedWork W2161646562 @default.
- W2020002995 hasRelatedWork W2166743285 @default.
- W2020002995 hasRelatedWork W3034115286 @default.
- W2020002995 hasRelatedWork W4234684427 @default.
- W2020002995 hasRelatedWork W2185073781 @default.
- W2020002995 hasVolume "33" @default.
- W2020002995 isParatext "false" @default.
- W2020002995 isRetracted "false" @default.
- W2020002995 magId "2020002995" @default.
- W2020002995 workType "article" @default.