Matches in SemOpenAlex for { <https://semopenalex.org/work/W2020050139> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W2020050139 endingPage "637" @default.
- W2020050139 startingPage "633" @default.
- W2020050139 abstract "Abstract A strongly preferential orientation of the (100) or the (110) plane has been obtained in polycrystalline Si films on quartz plates deposited from Si3H8 by photo-CVD. The (110) plane is obtained in films deposited below 560°C but it turns to (100) above 575°C. Molecular or atomic species in the gas of the reaction chamber have been measured by mass spectroscopic analysis, and their changes induced by substrate heating and VUV irradiation have been studied. The mechanism of the preferential orientation has been discussed by considering the bonding structure of the crystal plane and decomposed species on the surface." @default.
- W2020050139 created "2016-06-24" @default.
- W2020050139 creator A5000595967 @default.
- W2020050139 creator A5002557295 @default.
- W2020050139 creator A5031705180 @default.
- W2020050139 creator A5051679117 @default.
- W2020050139 creator A5069801452 @default.
- W2020050139 date "1990-01-01" @default.
- W2020050139 modified "2023-09-27" @default.
- W2020050139 title "Growth behavior of highly oriented Si films on fused quartz by photo-CVD" @default.
- W2020050139 cites W127924439 @default.
- W2020050139 cites W1970756170 @default.
- W2020050139 cites W1972141981 @default.
- W2020050139 cites W1976228981 @default.
- W2020050139 cites W1989276472 @default.
- W2020050139 cites W2022188255 @default.
- W2020050139 cites W2041891178 @default.
- W2020050139 cites W2051705560 @default.
- W2020050139 cites W2058458501 @default.
- W2020050139 cites W2065297957 @default.
- W2020050139 cites W2078286376 @default.
- W2020050139 doi "https://doi.org/10.1016/0169-4332(89)90134-7" @default.
- W2020050139 hasPublicationYear "1990" @default.
- W2020050139 type Work @default.
- W2020050139 sameAs 2020050139 @default.
- W2020050139 citedByCount "0" @default.
- W2020050139 crossrefType "journal-article" @default.
- W2020050139 hasAuthorship W2020050139A5000595967 @default.
- W2020050139 hasAuthorship W2020050139A5002557295 @default.
- W2020050139 hasAuthorship W2020050139A5031705180 @default.
- W2020050139 hasAuthorship W2020050139A5051679117 @default.
- W2020050139 hasAuthorship W2020050139A5069801452 @default.
- W2020050139 hasConcept C127413603 @default.
- W2020050139 hasConcept C159985019 @default.
- W2020050139 hasConcept C171250308 @default.
- W2020050139 hasConcept C185592680 @default.
- W2020050139 hasConcept C192562407 @default.
- W2020050139 hasConcept C199289684 @default.
- W2020050139 hasConcept C2779870107 @default.
- W2020050139 hasConcept C42360764 @default.
- W2020050139 hasConcept C49040817 @default.
- W2020050139 hasConcept C57410435 @default.
- W2020050139 hasConceptScore W2020050139C127413603 @default.
- W2020050139 hasConceptScore W2020050139C159985019 @default.
- W2020050139 hasConceptScore W2020050139C171250308 @default.
- W2020050139 hasConceptScore W2020050139C185592680 @default.
- W2020050139 hasConceptScore W2020050139C192562407 @default.
- W2020050139 hasConceptScore W2020050139C199289684 @default.
- W2020050139 hasConceptScore W2020050139C2779870107 @default.
- W2020050139 hasConceptScore W2020050139C42360764 @default.
- W2020050139 hasConceptScore W2020050139C49040817 @default.
- W2020050139 hasConceptScore W2020050139C57410435 @default.
- W2020050139 hasLocation W20200501391 @default.
- W2020050139 hasOpenAccess W2020050139 @default.
- W2020050139 hasPrimaryLocation W20200501391 @default.
- W2020050139 hasRelatedWork W2058676402 @default.
- W2020050139 hasRelatedWork W2059363835 @default.
- W2020050139 hasRelatedWork W2139871202 @default.
- W2020050139 hasRelatedWork W2292675962 @default.
- W2020050139 hasRelatedWork W2329285141 @default.
- W2020050139 hasRelatedWork W2399397734 @default.
- W2020050139 hasRelatedWork W2557666381 @default.
- W2020050139 hasRelatedWork W2803438740 @default.
- W2020050139 hasRelatedWork W2902546961 @default.
- W2020050139 hasRelatedWork W4206529606 @default.
- W2020050139 hasVolume "41-42" @default.
- W2020050139 isParatext "false" @default.
- W2020050139 isRetracted "false" @default.
- W2020050139 magId "2020050139" @default.
- W2020050139 workType "article" @default.