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• W2020062487 abstract "In this contribution, results of RF (13.56 MHz) sputtering of polyisobutylene (PIB) and low density polyethylene (LDPE) are presented. The film was formed from species sputtered from the target or evaporated from the target surface due to thermal heating from the positive ion bombardment. When a certain power level was reached the evaporation dominated in the deposition process. The deposition rate sharply increased (more than one order of magnitude) and composition of the films changed. Films prepared in the evaporation mode were in general more similar in their structure to the original polymer." @default.
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• W2020062487 date "2005-10-01" @default.
• W2020062487 modified "2023-10-01" @default.
• W2020062487 title "RF magnetron sputtering and evaporation of polyisobutylene and low density polyethylene" @default.
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• W2020062487 doi "https://doi.org/10.1016/j.surfcoat.2005.02.107" @default.
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