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• W2020071421 abstract "A remote microwave plasma enhanced chemical vapour deposition system was optimized to deposit different types of diamond like carbon films, as well as, some ordered carbon structures like carbon nanotubes (CNTs) and nanodiamonds. These films were obtained at room temperature using C2H2+Ar as the feedstock and at different sets of parameter space. While some DLC films had the required optical parameters to provide an anti-reflection coating on Si solar cells (1.9% enhancement of efficiency), others were transparent in the visible region. CNTs and nanodiamond structures were obtained simply by varying the applied RF bias at an optimized microwave power of 25 W. Hardness and stress of these films were in the range of 9–20 GPa and <1 GPa, respectively. The root mean square roughness in DLC films varied from 0.06 to 0.12 nm. Raman spectroscopy was performed to identify different phases present in the films. The grain size of nanocrystalline diamonds varied from 40 to 120 nm. The CNTs were found to be multiwalled with their diameters varying from 23 to 30 nm." @default.
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• W2020071421 date "2001-08-01" @default.
• W2020071421 modified "2023-10-02" @default.
• W2020071421 title "Versatile microwave PECVD technique for deposition of DLC and other ordered carbon nanostructures" @default.
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• W2020071421 doi "https://doi.org/10.1016/s0042-207x(01)00362-1" @default.
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