Matches in SemOpenAlex for { <https://semopenalex.org/work/W2020087181> ?p ?o ?g. }
- W2020087181 abstract "Abstract We investigate the ability to reconstruct strained silicon-on-insulator (sSOI) substrates in ultra-high vacuum for use in atomic scale device fabrication. Characterisation of the starting sSOI substrate using μRaman shows an average tensile strain of 0.8%, with clear strain modulation in a crosshatch pattern across the surface. The surfaces were heated in ultra-high vacuum from temperatures of 900 °C to 1100 °C and subsequently imaged using scanning tunnelling microscopy (STM). The initial strain modulation on the surface is observed to promote silicon migration and the formation of crosshatched surface features whose height and pitch increases with increasing annealing temperature. STM images reveal alternating narrow straight S A steps and triangular wavy S B steps attributed to the spontaneous faceting of S B and preferential adatom attachment on S B under biaxial tensile strain. Raman spectroscopy shows that despite these high temperature anneals no strain relaxation of the substrate is observed up to temperatures of 1020 °C. Above 1100 °C, strain relaxation is evident but is confined to the surface." @default.
- W2020087181 created "2016-06-24" @default.
- W2020087181 creator A5004978295 @default.
- W2020087181 creator A5005314091 @default.
- W2020087181 creator A5023047552 @default.
- W2020087181 creator A5028014163 @default.
- W2020087181 creator A5028405043 @default.
- W2020087181 creator A5043192495 @default.
- W2020087181 creator A5048321503 @default.
- W2020087181 creator A5049405877 @default.
- W2020087181 creator A5054109826 @default.
- W2020087181 creator A5067987234 @default.
- W2020087181 creator A5068533733 @default.
- W2020087181 date "2013-01-01" @default.
- W2020087181 modified "2023-09-26" @default.
- W2020087181 title "Thermal processing of strained silicon-on-insulator for atomically precise silicon device fabrication" @default.
- W2020087181 cites W1509182036 @default.
- W2020087181 cites W1963822093 @default.
- W2020087181 cites W1965805242 @default.
- W2020087181 cites W1973209491 @default.
- W2020087181 cites W1980483995 @default.
- W2020087181 cites W1998163577 @default.
- W2020087181 cites W2008024581 @default.
- W2020087181 cites W2009960698 @default.
- W2020087181 cites W2011042741 @default.
- W2020087181 cites W2020515634 @default.
- W2020087181 cites W2026534314 @default.
- W2020087181 cites W2034490546 @default.
- W2020087181 cites W2041309333 @default.
- W2020087181 cites W2046314159 @default.
- W2020087181 cites W2047189471 @default.
- W2020087181 cites W2047484590 @default.
- W2020087181 cites W2048718103 @default.
- W2020087181 cites W2058149046 @default.
- W2020087181 cites W2078601402 @default.
- W2020087181 cites W2079699561 @default.
- W2020087181 cites W2086169241 @default.
- W2020087181 cites W2087989163 @default.
- W2020087181 cites W2108019396 @default.
- W2020087181 cites W2108117221 @default.
- W2020087181 cites W2129454272 @default.
- W2020087181 cites W2334055253 @default.
- W2020087181 doi "https://doi.org/10.1016/j.apsusc.2012.11.129" @default.
- W2020087181 hasPublicationYear "2013" @default.
- W2020087181 type Work @default.
- W2020087181 sameAs 2020087181 @default.
- W2020087181 citedByCount "3" @default.
- W2020087181 countsByYear W20200871812014 @default.
- W2020087181 countsByYear W20200871812016 @default.
- W2020087181 countsByYear W20200871812018 @default.
- W2020087181 crossrefType "journal-article" @default.
- W2020087181 hasAuthorship W2020087181A5004978295 @default.
- W2020087181 hasAuthorship W2020087181A5005314091 @default.
- W2020087181 hasAuthorship W2020087181A5023047552 @default.
- W2020087181 hasAuthorship W2020087181A5028014163 @default.
- W2020087181 hasAuthorship W2020087181A5028405043 @default.
- W2020087181 hasAuthorship W2020087181A5043192495 @default.
- W2020087181 hasAuthorship W2020087181A5048321503 @default.
- W2020087181 hasAuthorship W2020087181A5049405877 @default.
- W2020087181 hasAuthorship W2020087181A5054109826 @default.
- W2020087181 hasAuthorship W2020087181A5067987234 @default.
- W2020087181 hasAuthorship W2020087181A5068533733 @default.
- W2020087181 hasConcept C111368507 @default.
- W2020087181 hasConcept C120398109 @default.
- W2020087181 hasConcept C120665830 @default.
- W2020087181 hasConcept C121332964 @default.
- W2020087181 hasConcept C126322002 @default.
- W2020087181 hasConcept C127313418 @default.
- W2020087181 hasConcept C136525101 @default.
- W2020087181 hasConcept C142724271 @default.
- W2020087181 hasConcept C149912024 @default.
- W2020087181 hasConcept C159985019 @default.
- W2020087181 hasConcept C171250308 @default.
- W2020087181 hasConcept C192245399 @default.
- W2020087181 hasConcept C192562407 @default.
- W2020087181 hasConcept C202974441 @default.
- W2020087181 hasConcept C204787440 @default.
- W2020087181 hasConcept C2776390347 @default.
- W2020087181 hasConcept C2777289219 @default.
- W2020087181 hasConcept C2777855556 @default.
- W2020087181 hasConcept C2778022156 @default.
- W2020087181 hasConcept C2779667780 @default.
- W2020087181 hasConcept C40003534 @default.
- W2020087181 hasConcept C49040817 @default.
- W2020087181 hasConcept C53143962 @default.
- W2020087181 hasConcept C544956773 @default.
- W2020087181 hasConcept C6518042 @default.
- W2020087181 hasConcept C71924100 @default.
- W2020087181 hasConcept C82225425 @default.
- W2020087181 hasConceptScore W2020087181C111368507 @default.
- W2020087181 hasConceptScore W2020087181C120398109 @default.
- W2020087181 hasConceptScore W2020087181C120665830 @default.
- W2020087181 hasConceptScore W2020087181C121332964 @default.
- W2020087181 hasConceptScore W2020087181C126322002 @default.
- W2020087181 hasConceptScore W2020087181C127313418 @default.
- W2020087181 hasConceptScore W2020087181C136525101 @default.
- W2020087181 hasConceptScore W2020087181C142724271 @default.
- W2020087181 hasConceptScore W2020087181C149912024 @default.
- W2020087181 hasConceptScore W2020087181C159985019 @default.
- W2020087181 hasConceptScore W2020087181C171250308 @default.