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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2020100000> ?p ?o ?g. }

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• W2020100000 abstract "Li(OBut) was examined as a Li source in low pressure metalorganic chemical vapor deposition (LP-MOCVD). Vapor species of Li component and Nb component (from a Nb (OEt)5 source) carried with argon gas were blown on a SiO2Si substrate heated at 450–630°C. The deposited films were confirmed to be crystalline LiNbO3 by X-ray diffraction." @default.
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• W2020100000 date "1995-03-01" @default.
• W2020100000 modified "2023-09-26" @default.
• W2020100000 title "Preparation of lithium niobate films by metalorganic chemical vapor deposition with a lithium alkoxide source" @default.
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• W2020100000 doi "https://doi.org/10.1016/0022-0248(94)01003-x" @default.
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