Matches in SemOpenAlex for { <https://semopenalex.org/work/W2020137743> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2020137743 endingPage "941" @default.
- W2020137743 startingPage "937" @default.
- W2020137743 abstract "Quantitative analysis of the native oxide on silicon wafers has been investigated by secondary ion mass spectrometry (SIMS) combined with an encapsulation method. In the encapsulation technique, the sample surface is covered with a thin film whose material is identical to that of the substrate of the sample, and the analysis of the interface between the thin film and the original sample surface is performed. This technique enables quantitative analysis of the top surface of the original sample. The present study describes the optimization of the encapsulating film thickness, the reproducibility of the oxygen determination and the oxygen enhancement effects at the interface between the encapsulation film and the original sample surface. Results indicate that the minimum encapsulating film thickness is ∽130 nm when using a 14.5 keV Cs+ primary ion beam. The highest oxygen areal density that can be determined with good accuracy at the interface between the encapsulation film and the original silicon surface was 8×1014 atoms cm-2. © 1997 John Wiley & Sons, Ltd." @default.
- W2020137743 created "2016-06-24" @default.
- W2020137743 creator A5001378505 @default.
- W2020137743 creator A5070911050 @default.
- W2020137743 date "1997-11-01" @default.
- W2020137743 modified "2023-10-18" @default.
- W2020137743 title "Quantitative secondary ion mass spectrometry analysis of the native oxide on silicon wafers" @default.
- W2020137743 cites W1964689415 @default.
- W2020137743 cites W1971833872 @default.
- W2020137743 cites W1979067124 @default.
- W2020137743 cites W1984848782 @default.
- W2020137743 cites W1991507053 @default.
- W2020137743 cites W1996985854 @default.
- W2020137743 cites W2002367836 @default.
- W2020137743 cites W2014568093 @default.
- W2020137743 cites W2018052420 @default.
- W2020137743 cites W2047894289 @default.
- W2020137743 cites W2048627770 @default.
- W2020137743 cites W2050772514 @default.
- W2020137743 cites W2076785436 @default.
- W2020137743 cites W2085271155 @default.
- W2020137743 cites W2089342246 @default.
- W2020137743 cites W2091640905 @default.
- W2020137743 cites W2138765073 @default.
- W2020137743 cites W2152008325 @default.
- W2020137743 doi "https://doi.org/10.1002/(sici)1096-9918(199711)25:12<937::aid-sia327>3.0.co;2-s" @default.
- W2020137743 hasPublicationYear "1997" @default.
- W2020137743 type Work @default.
- W2020137743 sameAs 2020137743 @default.
- W2020137743 citedByCount "7" @default.
- W2020137743 crossrefType "journal-article" @default.
- W2020137743 hasAuthorship W2020137743A5001378505 @default.
- W2020137743 hasAuthorship W2020137743A5070911050 @default.
- W2020137743 hasConcept C113196181 @default.
- W2020137743 hasConcept C145148216 @default.
- W2020137743 hasConcept C160671074 @default.
- W2020137743 hasConcept C162356407 @default.
- W2020137743 hasConcept C171250308 @default.
- W2020137743 hasConcept C178790620 @default.
- W2020137743 hasConcept C185592680 @default.
- W2020137743 hasConcept C19067145 @default.
- W2020137743 hasConcept C191897082 @default.
- W2020137743 hasConcept C192562407 @default.
- W2020137743 hasConcept C2777431650 @default.
- W2020137743 hasConcept C2778576202 @default.
- W2020137743 hasConcept C2779105228 @default.
- W2020137743 hasConcept C2779851234 @default.
- W2020137743 hasConcept C43617362 @default.
- W2020137743 hasConcept C49040817 @default.
- W2020137743 hasConcept C540031477 @default.
- W2020137743 hasConcept C544956773 @default.
- W2020137743 hasConcept C77671233 @default.
- W2020137743 hasConceptScore W2020137743C113196181 @default.
- W2020137743 hasConceptScore W2020137743C145148216 @default.
- W2020137743 hasConceptScore W2020137743C160671074 @default.
- W2020137743 hasConceptScore W2020137743C162356407 @default.
- W2020137743 hasConceptScore W2020137743C171250308 @default.
- W2020137743 hasConceptScore W2020137743C178790620 @default.
- W2020137743 hasConceptScore W2020137743C185592680 @default.
- W2020137743 hasConceptScore W2020137743C19067145 @default.
- W2020137743 hasConceptScore W2020137743C191897082 @default.
- W2020137743 hasConceptScore W2020137743C192562407 @default.
- W2020137743 hasConceptScore W2020137743C2777431650 @default.
- W2020137743 hasConceptScore W2020137743C2778576202 @default.
- W2020137743 hasConceptScore W2020137743C2779105228 @default.
- W2020137743 hasConceptScore W2020137743C2779851234 @default.
- W2020137743 hasConceptScore W2020137743C43617362 @default.
- W2020137743 hasConceptScore W2020137743C49040817 @default.
- W2020137743 hasConceptScore W2020137743C540031477 @default.
- W2020137743 hasConceptScore W2020137743C544956773 @default.
- W2020137743 hasConceptScore W2020137743C77671233 @default.
- W2020137743 hasIssue "12" @default.
- W2020137743 hasLocation W20201377431 @default.
- W2020137743 hasOpenAccess W2020137743 @default.
- W2020137743 hasPrimaryLocation W20201377431 @default.
- W2020137743 hasRelatedWork W2005572407 @default.
- W2020137743 hasRelatedWork W2044888013 @default.
- W2020137743 hasRelatedWork W2051927078 @default.
- W2020137743 hasRelatedWork W2060264477 @default.
- W2020137743 hasRelatedWork W2066900379 @default.
- W2020137743 hasRelatedWork W2068204494 @default.
- W2020137743 hasRelatedWork W2092931996 @default.
- W2020137743 hasRelatedWork W2117727627 @default.
- W2020137743 hasRelatedWork W4220916081 @default.
- W2020137743 hasRelatedWork W1991474562 @default.
- W2020137743 hasVolume "25" @default.
- W2020137743 isParatext "false" @default.
- W2020137743 isRetracted "false" @default.
- W2020137743 magId "2020137743" @default.
- W2020137743 workType "article" @default.