Matches in SemOpenAlex for { <https://semopenalex.org/work/W2020141572> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2020141572 endingPage "520" @default.
- W2020141572 startingPage "514" @default.
- W2020141572 abstract "A universal non-invasive real-time frequency domain reflectometry plasma process measurement that is independent of impedance matching network is described. The measurement is deployed on the main power transmission line of the plasma tool to detect both hardware and reflections form plasma. An illustration for atmospheric pressure plasma and axial DC magnetron plasma is given. Power handling capability is 20 (2 A×10 V) and 100 W (250 mA×400 V), respectively. Four simple equivalent electrical models in terms of transmission-line theory and frequency dependent reflection modulus (gain) are employed to analyze the DC magnetron measurement results. It is shown that the electrical length between the directional device measurement plane and the plane at which the transmission line is termination by the hardware and plasma determines the frequency response signal. The strength of the signal (depth of the zero) is found to be inversely related to the termination resistance. Information on hardware, and dynamic process-induced changes due to physical sputtering/erosion are accessible." @default.
- W2020141572 created "2016-06-24" @default.
- W2020141572 creator A5011201829 @default.
- W2020141572 creator A5018890261 @default.
- W2020141572 creator A5076911620 @default.
- W2020141572 date "2008-01-01" @default.
- W2020141572 modified "2023-09-26" @default.
- W2020141572 title "Non-invasive VHF injected signal monitoring in atmospheric pressure plasma and axial DC magnetron" @default.
- W2020141572 cites W2017134487 @default.
- W2020141572 cites W2035207624 @default.
- W2020141572 cites W2038289869 @default.
- W2020141572 cites W2067487154 @default.
- W2020141572 doi "https://doi.org/10.1016/j.vacuum.2007.08.007" @default.
- W2020141572 hasPublicationYear "2008" @default.
- W2020141572 type Work @default.
- W2020141572 sameAs 2020141572 @default.
- W2020141572 citedByCount "3" @default.
- W2020141572 countsByYear W20201415722022 @default.
- W2020141572 crossrefType "journal-article" @default.
- W2020141572 hasAuthorship W2020141572A5011201829 @default.
- W2020141572 hasAuthorship W2020141572A5018890261 @default.
- W2020141572 hasAuthorship W2020141572A5076911620 @default.
- W2020141572 hasConcept C103824480 @default.
- W2020141572 hasConcept C119599485 @default.
- W2020141572 hasConcept C120665830 @default.
- W2020141572 hasConcept C121332964 @default.
- W2020141572 hasConcept C123408415 @default.
- W2020141572 hasConcept C127413603 @default.
- W2020141572 hasConcept C171250308 @default.
- W2020141572 hasConcept C17829176 @default.
- W2020141572 hasConcept C19067145 @default.
- W2020141572 hasConcept C192562407 @default.
- W2020141572 hasConcept C199360897 @default.
- W2020141572 hasConcept C22423302 @default.
- W2020141572 hasConcept C24890656 @default.
- W2020141572 hasConcept C2778925768 @default.
- W2020141572 hasConcept C2779843651 @default.
- W2020141572 hasConcept C31972630 @default.
- W2020141572 hasConcept C33441834 @default.
- W2020141572 hasConcept C41008148 @default.
- W2020141572 hasConcept C612350 @default.
- W2020141572 hasConcept C62520636 @default.
- W2020141572 hasConcept C65682993 @default.
- W2020141572 hasConcept C74064498 @default.
- W2020141572 hasConcept C761482 @default.
- W2020141572 hasConcept C82706917 @default.
- W2020141572 hasConcept C85344455 @default.
- W2020141572 hasConceptScore W2020141572C103824480 @default.
- W2020141572 hasConceptScore W2020141572C119599485 @default.
- W2020141572 hasConceptScore W2020141572C120665830 @default.
- W2020141572 hasConceptScore W2020141572C121332964 @default.
- W2020141572 hasConceptScore W2020141572C123408415 @default.
- W2020141572 hasConceptScore W2020141572C127413603 @default.
- W2020141572 hasConceptScore W2020141572C171250308 @default.
- W2020141572 hasConceptScore W2020141572C17829176 @default.
- W2020141572 hasConceptScore W2020141572C19067145 @default.
- W2020141572 hasConceptScore W2020141572C192562407 @default.
- W2020141572 hasConceptScore W2020141572C199360897 @default.
- W2020141572 hasConceptScore W2020141572C22423302 @default.
- W2020141572 hasConceptScore W2020141572C24890656 @default.
- W2020141572 hasConceptScore W2020141572C2778925768 @default.
- W2020141572 hasConceptScore W2020141572C2779843651 @default.
- W2020141572 hasConceptScore W2020141572C31972630 @default.
- W2020141572 hasConceptScore W2020141572C33441834 @default.
- W2020141572 hasConceptScore W2020141572C41008148 @default.
- W2020141572 hasConceptScore W2020141572C612350 @default.
- W2020141572 hasConceptScore W2020141572C62520636 @default.
- W2020141572 hasConceptScore W2020141572C65682993 @default.
- W2020141572 hasConceptScore W2020141572C74064498 @default.
- W2020141572 hasConceptScore W2020141572C761482 @default.
- W2020141572 hasConceptScore W2020141572C82706917 @default.
- W2020141572 hasConceptScore W2020141572C85344455 @default.
- W2020141572 hasIssue "5" @default.
- W2020141572 hasLocation W20201415721 @default.
- W2020141572 hasOpenAccess W2020141572 @default.
- W2020141572 hasPrimaryLocation W20201415721 @default.
- W2020141572 hasRelatedWork W1481845210 @default.
- W2020141572 hasRelatedWork W2011624358 @default.
- W2020141572 hasRelatedWork W2020141572 @default.
- W2020141572 hasRelatedWork W2108536434 @default.
- W2020141572 hasRelatedWork W2156528700 @default.
- W2020141572 hasRelatedWork W2379486534 @default.
- W2020141572 hasRelatedWork W2966608601 @default.
- W2020141572 hasRelatedWork W3001647706 @default.
- W2020141572 hasRelatedWork W39399236 @default.
- W2020141572 hasRelatedWork W4321020616 @default.
- W2020141572 hasVolume "82" @default.
- W2020141572 isParatext "false" @default.
- W2020141572 isRetracted "false" @default.
- W2020141572 magId "2020141572" @default.
- W2020141572 workType "article" @default.