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- W2020145594 abstract "Krypton and arsenic ions at energies of 600 keV were implanted into 〈100〉 Si wafers in the temperature range 250–350° C. The fluences ranged from 1 to 4 × 1015 cm−2. The samples were rapidly thermally annealed at temperatures above 1000°C for periods of several seconds. The damage and its removal were studied by channeling and transmission electron microscopy. The damage depends on the implanted species and it is higher for Kr than for As ions, although their generation rate of defects is nearly the same. The residual damage present, such as extended defects, dislocation lines and loops, anneals out with an activation energy of 4.4 ± 0.3 eV. During rapid thermal annealing no appreciable broadening of the As distribution was measured." @default.
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- W2020145594 date "1989-03-01" @default.
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- W2020145594 title "Rapid thermal annealing of hot implants in silicon" @default.
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