Matches in SemOpenAlex for { <https://semopenalex.org/work/W2020147605> ?p ?o ?g. }
- W2020147605 endingPage "5443" @default.
- W2020147605 startingPage "5437" @default.
- W2020147605 abstract "Radical species produced in catalytic chemical vapor deposition (CVD), often called hot-wire CVD, processes were identified by using a laser induced fluorescence technique. Ground state Si atoms could be detected at low pressures where collisional processes in the gas phase could be ignored. The electronic temperature of Si atoms just after the formation on the catalyzer (tungsten) surfaces was 1320±490 K, when the catalyzer temperature was 2300 K. By the addition of 0.5 Pa of Ar, the electronic temperature was lowered down to 450±30 K. The absolute density of Si atoms was 3±1×109 cm−3 at 10 cm below the catalyzer when the flow rate and the pressure of SiH4 were 0.5 sccm and 4 mPa, respectively. This density is just 0.3% of that of the parent SiH4 molecules. However, since the decay rate of Si atoms is fast, it can be concluded that atomic silicon is one of the major products on the heated catalyzer surfaces. SiH radicals could also be detected, but the production rate of this species is two orders of magnitude less than that of Si atoms. It was also discovered that volatile SiH4 molecules are produced by the atomic hydrogen attack on the amorphous silicon deposited on the chamber walls." @default.
- W2020147605 created "2016-06-24" @default.
- W2020147605 creator A5015772112 @default.
- W2020147605 creator A5034827268 @default.
- W2020147605 creator A5041893900 @default.
- W2020147605 creator A5053776667 @default.
- W2020147605 creator A5064646964 @default.
- W2020147605 creator A5064928298 @default.
- W2020147605 creator A5075309220 @default.
- W2020147605 creator A5085790074 @default.
- W2020147605 date "2000-11-01" @default.
- W2020147605 modified "2023-10-12" @default.
- W2020147605 title "Identification of Si and SiH in catalytic chemical vapor deposition of SiH4 by laser induced fluorescence spectroscopy" @default.
- W2020147605 cites W1518884678 @default.
- W2020147605 cites W1807905987 @default.
- W2020147605 cites W1964148234 @default.
- W2020147605 cites W1964187611 @default.
- W2020147605 cites W1964902374 @default.
- W2020147605 cites W1970618290 @default.
- W2020147605 cites W1972256607 @default.
- W2020147605 cites W1987796965 @default.
- W2020147605 cites W1992917998 @default.
- W2020147605 cites W1994153310 @default.
- W2020147605 cites W1995116358 @default.
- W2020147605 cites W2004589580 @default.
- W2020147605 cites W2012747312 @default.
- W2020147605 cites W2018809980 @default.
- W2020147605 cites W2021066912 @default.
- W2020147605 cites W2027352463 @default.
- W2020147605 cites W2041378425 @default.
- W2020147605 cites W2047875844 @default.
- W2020147605 cites W2049478289 @default.
- W2020147605 cites W2049600748 @default.
- W2020147605 cites W2049626935 @default.
- W2020147605 cites W2051435399 @default.
- W2020147605 cites W2063125035 @default.
- W2020147605 cites W2074023800 @default.
- W2020147605 cites W2079891489 @default.
- W2020147605 cites W2081743013 @default.
- W2020147605 cites W2085072569 @default.
- W2020147605 cites W2087582592 @default.
- W2020147605 cites W2092147957 @default.
- W2020147605 cites W2095194200 @default.
- W2020147605 cites W2124891668 @default.
- W2020147605 cites W2127458408 @default.
- W2020147605 cites W2158155048 @default.
- W2020147605 cites W2625699652 @default.
- W2020147605 cites W2950351728 @default.
- W2020147605 cites W2952791253 @default.
- W2020147605 doi "https://doi.org/10.1063/1.1314330" @default.
- W2020147605 hasPublicationYear "2000" @default.
- W2020147605 type Work @default.
- W2020147605 sameAs 2020147605 @default.
- W2020147605 citedByCount "87" @default.
- W2020147605 countsByYear W20201476052012 @default.
- W2020147605 countsByYear W20201476052013 @default.
- W2020147605 countsByYear W20201476052014 @default.
- W2020147605 countsByYear W20201476052015 @default.
- W2020147605 countsByYear W20201476052016 @default.
- W2020147605 countsByYear W20201476052017 @default.
- W2020147605 countsByYear W20201476052018 @default.
- W2020147605 countsByYear W20201476052019 @default.
- W2020147605 countsByYear W20201476052020 @default.
- W2020147605 crossrefType "journal-article" @default.
- W2020147605 hasAuthorship W2020147605A5015772112 @default.
- W2020147605 hasAuthorship W2020147605A5034827268 @default.
- W2020147605 hasAuthorship W2020147605A5041893900 @default.
- W2020147605 hasAuthorship W2020147605A5053776667 @default.
- W2020147605 hasAuthorship W2020147605A5064646964 @default.
- W2020147605 hasAuthorship W2020147605A5064928298 @default.
- W2020147605 hasAuthorship W2020147605A5075309220 @default.
- W2020147605 hasAuthorship W2020147605A5085790074 @default.
- W2020147605 hasConcept C113196181 @default.
- W2020147605 hasConcept C161790260 @default.
- W2020147605 hasConcept C171250308 @default.
- W2020147605 hasConcept C178790620 @default.
- W2020147605 hasConcept C185592680 @default.
- W2020147605 hasConcept C192562407 @default.
- W2020147605 hasConcept C2778024649 @default.
- W2020147605 hasConcept C2778183973 @default.
- W2020147605 hasConcept C43617362 @default.
- W2020147605 hasConcept C512968161 @default.
- W2020147605 hasConcept C542268612 @default.
- W2020147605 hasConcept C544956773 @default.
- W2020147605 hasConcept C55493867 @default.
- W2020147605 hasConcept C57410435 @default.
- W2020147605 hasConceptScore W2020147605C113196181 @default.
- W2020147605 hasConceptScore W2020147605C161790260 @default.
- W2020147605 hasConceptScore W2020147605C171250308 @default.
- W2020147605 hasConceptScore W2020147605C178790620 @default.
- W2020147605 hasConceptScore W2020147605C185592680 @default.
- W2020147605 hasConceptScore W2020147605C192562407 @default.
- W2020147605 hasConceptScore W2020147605C2778024649 @default.
- W2020147605 hasConceptScore W2020147605C2778183973 @default.
- W2020147605 hasConceptScore W2020147605C43617362 @default.
- W2020147605 hasConceptScore W2020147605C512968161 @default.
- W2020147605 hasConceptScore W2020147605C542268612 @default.
- W2020147605 hasConceptScore W2020147605C544956773 @default.