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- W2020148610 abstract "Design, synthesis, and application of the new Ti precursors [Ti(MPD)(MDOP) 2 and the binuclear precursor D (designated as D due to patent pending) derived from thereof] for MOCVD of TiO 2 thin film are reported. The new Ti precursors are stable in the air and moisture and thermally stable at vaporizing temperature. The deposition rate of TiO 2 films with the new Ti precursor D was much higher than that with Ti(MPD)(tmhd) 2 or with Ti(Opr i ) 2 (tmhd) 2 at 375∼475°C. Therefore, the new Ti precursors are expected to yield BST thin films with constant composition in Ba, Sr, and Ti utilizing the prevalent Ba and Sr precursors and current MOCVD technology It is believed that the high deposition rate of TiO 2 thin film is caused by the weaker bond strength of Ti-MDOP than Ti-tmhd." @default.
- W2020148610 created "2016-06-24" @default.
- W2020148610 creator A5068604457 @default.
- W2020148610 date "2002-06-01" @default.
- W2020148610 modified "2023-09-28" @default.
- W2020148610 title "Design, synthesis, and application of new Ti precursors compatible with Ba and Sr precursors for BST thin film by MOCVD" @default.
- W2020148610 doi "https://doi.org/10.1051/jp4:20020076" @default.
- W2020148610 hasPublicationYear "2002" @default.
- W2020148610 type Work @default.
- W2020148610 sameAs 2020148610 @default.
- W2020148610 citedByCount "0" @default.
- W2020148610 crossrefType "journal-article" @default.
- W2020148610 hasAuthorship W2020148610A5068604457 @default.
- W2020148610 hasConcept C110738630 @default.
- W2020148610 hasConcept C127413603 @default.
- W2020148610 hasConcept C134121241 @default.
- W2020148610 hasConcept C151730666 @default.
- W2020148610 hasConcept C159985019 @default.
- W2020148610 hasConcept C171250308 @default.
- W2020148610 hasConcept C175665537 @default.
- W2020148610 hasConcept C185592680 @default.
- W2020148610 hasConcept C19067145 @default.
- W2020148610 hasConcept C192562407 @default.
- W2020148610 hasConcept C199289684 @default.
- W2020148610 hasConcept C2779227376 @default.
- W2020148610 hasConcept C2816523 @default.
- W2020148610 hasConcept C42360764 @default.
- W2020148610 hasConcept C57410435 @default.
- W2020148610 hasConcept C64297162 @default.
- W2020148610 hasConcept C86803240 @default.
- W2020148610 hasConceptScore W2020148610C110738630 @default.
- W2020148610 hasConceptScore W2020148610C127413603 @default.
- W2020148610 hasConceptScore W2020148610C134121241 @default.
- W2020148610 hasConceptScore W2020148610C151730666 @default.
- W2020148610 hasConceptScore W2020148610C159985019 @default.
- W2020148610 hasConceptScore W2020148610C171250308 @default.
- W2020148610 hasConceptScore W2020148610C175665537 @default.
- W2020148610 hasConceptScore W2020148610C185592680 @default.
- W2020148610 hasConceptScore W2020148610C19067145 @default.
- W2020148610 hasConceptScore W2020148610C192562407 @default.
- W2020148610 hasConceptScore W2020148610C199289684 @default.
- W2020148610 hasConceptScore W2020148610C2779227376 @default.
- W2020148610 hasConceptScore W2020148610C2816523 @default.
- W2020148610 hasConceptScore W2020148610C42360764 @default.
- W2020148610 hasConceptScore W2020148610C57410435 @default.
- W2020148610 hasConceptScore W2020148610C64297162 @default.
- W2020148610 hasConceptScore W2020148610C86803240 @default.
- W2020148610 hasLocation W20201486101 @default.
- W2020148610 hasOpenAccess W2020148610 @default.
- W2020148610 hasPrimaryLocation W20201486101 @default.
- W2020148610 hasRelatedWork W1974801993 @default.
- W2020148610 hasRelatedWork W1976699611 @default.
- W2020148610 hasRelatedWork W1978845945 @default.
- W2020148610 hasRelatedWork W2007928985 @default.
- W2020148610 hasRelatedWork W2008406277 @default.
- W2020148610 hasRelatedWork W2009597118 @default.
- W2020148610 hasRelatedWork W2026550451 @default.
- W2020148610 hasRelatedWork W2029750552 @default.
- W2020148610 hasRelatedWork W2032449414 @default.
- W2020148610 hasRelatedWork W2057440551 @default.
- W2020148610 hasRelatedWork W2062754426 @default.
- W2020148610 hasRelatedWork W2072965166 @default.
- W2020148610 hasRelatedWork W2079092004 @default.
- W2020148610 hasRelatedWork W2093988288 @default.
- W2020148610 hasRelatedWork W2094196277 @default.
- W2020148610 hasRelatedWork W2102873070 @default.
- W2020148610 hasRelatedWork W2151575411 @default.
- W2020148610 hasRelatedWork W2154729485 @default.
- W2020148610 hasRelatedWork W2322666639 @default.
- W2020148610 hasRelatedWork W2520098051 @default.
- W2020148610 isParatext "false" @default.
- W2020148610 isRetracted "false" @default.
- W2020148610 magId "2020148610" @default.
- W2020148610 workType "article" @default.