Matches in SemOpenAlex for { <https://semopenalex.org/work/W2020163541> ?p ?o ?g. }
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- W2020163541 endingPage "3893" @default.
- W2020163541 startingPage "3891" @default.
- W2020163541 abstract "A simple fabrication method for submicron diameter metallic apertures using negative electron beam resist and metal lift-off has been developed. In general, the lift-off process is beneficial for semiconductor quantum dot spectroscopy, since the original surface condition of the substrate is not altered or destroyed as it may be in a conventional dry or wet etching processes to form apertures in a subtractive process. With an optimum combination of process parameters, such as higher pre- and postexposure bake temperatures for longer times, longer developing time and with optimal mixtures of developers, high aspect ratio resist posts were obtained. Using 20 kV single dot e-beam exposure, a reentrant profile can be obtained directly. While this profile is not obtained with 50 kV single dot e-beam exposure, a higher aspect ratio (∼7:1) and sub-100 nm diam resist posts are possible. High vertical sidewall 100 nm diam resist posts are obtained using 50 kV area e-beam exposures. Taking advantage of these characteristics: high aspect ratio, high vertical resist sidewall, and resist undercut at the bottom of post, sub-100 nm diam apertures in 100 nm thick metallic films are obtained by evaporation of metal on the sample and dissolving the resist post in solvent. For sub-100 nm apertures, a significant improvement in aperture edge smoothness was achieved by applying an oxygen plasma." @default.
- W2020163541 created "2016-06-24" @default.
- W2020163541 creator A5042918967 @default.
- W2020163541 date "1998-11-01" @default.
- W2020163541 modified "2023-10-06" @default.
- W2020163541 title "Small aperture fabrication for single quantum dot spectroscopy" @default.
- W2020163541 cites W1987065017 @default.
- W2020163541 cites W2053572542 @default.
- W2020163541 doi "https://doi.org/10.1116/1.590429" @default.
- W2020163541 hasPublicationYear "1998" @default.
- W2020163541 type Work @default.
- W2020163541 sameAs 2020163541 @default.
- W2020163541 citedByCount "4" @default.
- W2020163541 crossrefType "journal-article" @default.
- W2020163541 hasAuthorship W2020163541A5042918967 @default.
- W2020163541 hasBestOaLocation W20201635411 @default.
- W2020163541 hasConcept C100460472 @default.
- W2020163541 hasConcept C120665830 @default.
- W2020163541 hasConcept C121332964 @default.
- W2020163541 hasConcept C124657808 @default.
- W2020163541 hasConcept C136525101 @default.
- W2020163541 hasConcept C142724271 @default.
- W2020163541 hasConcept C159985019 @default.
- W2020163541 hasConcept C171250308 @default.
- W2020163541 hasConcept C192562407 @default.
- W2020163541 hasConcept C200274948 @default.
- W2020163541 hasConcept C204787440 @default.
- W2020163541 hasConcept C2779227376 @default.
- W2020163541 hasConcept C2779292183 @default.
- W2020163541 hasConcept C49040817 @default.
- W2020163541 hasConcept C53524968 @default.
- W2020163541 hasConcept C71924100 @default.
- W2020163541 hasConceptScore W2020163541C100460472 @default.
- W2020163541 hasConceptScore W2020163541C120665830 @default.
- W2020163541 hasConceptScore W2020163541C121332964 @default.
- W2020163541 hasConceptScore W2020163541C124657808 @default.
- W2020163541 hasConceptScore W2020163541C136525101 @default.
- W2020163541 hasConceptScore W2020163541C142724271 @default.
- W2020163541 hasConceptScore W2020163541C159985019 @default.
- W2020163541 hasConceptScore W2020163541C171250308 @default.
- W2020163541 hasConceptScore W2020163541C192562407 @default.
- W2020163541 hasConceptScore W2020163541C200274948 @default.
- W2020163541 hasConceptScore W2020163541C204787440 @default.
- W2020163541 hasConceptScore W2020163541C2779227376 @default.
- W2020163541 hasConceptScore W2020163541C2779292183 @default.
- W2020163541 hasConceptScore W2020163541C49040817 @default.
- W2020163541 hasConceptScore W2020163541C53524968 @default.
- W2020163541 hasConceptScore W2020163541C71924100 @default.
- W2020163541 hasIssue "6" @default.
- W2020163541 hasLocation W20201635411 @default.
- W2020163541 hasOpenAccess W2020163541 @default.
- W2020163541 hasPrimaryLocation W20201635411 @default.
- W2020163541 hasRelatedWork W1977588417 @default.
- W2020163541 hasRelatedWork W1984594347 @default.
- W2020163541 hasRelatedWork W1993620123 @default.
- W2020163541 hasRelatedWork W2025598540 @default.
- W2020163541 hasRelatedWork W2037306618 @default.
- W2020163541 hasRelatedWork W2071117045 @default.
- W2020163541 hasRelatedWork W2136502888 @default.
- W2020163541 hasRelatedWork W2964303512 @default.
- W2020163541 hasRelatedWork W2975304405 @default.
- W2020163541 hasRelatedWork W4298206121 @default.
- W2020163541 hasVolume "16" @default.
- W2020163541 isParatext "false" @default.
- W2020163541 isRetracted "false" @default.
- W2020163541 magId "2020163541" @default.
- W2020163541 workType "article" @default.