Matches in SemOpenAlex for { <https://semopenalex.org/work/W2020165996> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2020165996 endingPage "147" @default.
- W2020165996 startingPage "144" @default.
- W2020165996 abstract "Abstract In this paper is reported a systematic study of the effect of dose rate (ion beam current) on ion implanted impurity profiles in single-crystal silicon. A close examination of the effect of dose rate on as-implanted profiles reveals that for both boron and arsenic implantation, for beam currents ranging from 0.4 mA to 12 mA, dose rate has a small but clearly observable effect on channeling tails with higher beam currents producing shallower profiles. The effect is greater for on-axis (0° tilt/0° rotation) implants than for off-axis (8–9° tilt/30° rotation) implants. Lower mass (boron) implants have a more significant dose rate effect than do higher mass (arsenic) implants." @default.
- W2020165996 created "2016-06-24" @default.
- W2020165996 creator A5022735365 @default.
- W2020165996 creator A5027521422 @default.
- W2020165996 creator A5033107251 @default.
- W2020165996 creator A5040415773 @default.
- W2020165996 creator A5041164140 @default.
- W2020165996 creator A5048939322 @default.
- W2020165996 creator A5063308319 @default.
- W2020165996 creator A5066046784 @default.
- W2020165996 creator A5071189526 @default.
- W2020165996 creator A5085213064 @default.
- W2020165996 date "1996-05-01" @default.
- W2020165996 modified "2023-10-01" @default.
- W2020165996 title "The effect of dose rate on ion implanted impurity profiles in silicon" @default.
- W2020165996 cites W1971746902 @default.
- W2020165996 cites W2010297009 @default.
- W2020165996 cites W2032341061 @default.
- W2020165996 cites W2037781165 @default.
- W2020165996 cites W2065513300 @default.
- W2020165996 cites W2086559718 @default.
- W2020165996 cites W2152022850 @default.
- W2020165996 doi "https://doi.org/10.1016/0168-583x(95)01280-x" @default.
- W2020165996 hasPublicationYear "1996" @default.
- W2020165996 type Work @default.
- W2020165996 sameAs 2020165996 @default.
- W2020165996 citedByCount "12" @default.
- W2020165996 countsByYear W20201659962016 @default.
- W2020165996 crossrefType "journal-article" @default.
- W2020165996 hasAuthorship W2020165996A5022735365 @default.
- W2020165996 hasAuthorship W2020165996A5027521422 @default.
- W2020165996 hasAuthorship W2020165996A5033107251 @default.
- W2020165996 hasAuthorship W2020165996A5040415773 @default.
- W2020165996 hasAuthorship W2020165996A5041164140 @default.
- W2020165996 hasAuthorship W2020165996A5048939322 @default.
- W2020165996 hasAuthorship W2020165996A5063308319 @default.
- W2020165996 hasAuthorship W2020165996A5066046784 @default.
- W2020165996 hasAuthorship W2020165996A5071189526 @default.
- W2020165996 hasAuthorship W2020165996A5085213064 @default.
- W2020165996 hasConcept C113196181 @default.
- W2020165996 hasConcept C145148216 @default.
- W2020165996 hasConcept C177322064 @default.
- W2020165996 hasConcept C178790620 @default.
- W2020165996 hasConcept C185592680 @default.
- W2020165996 hasConcept C192562407 @default.
- W2020165996 hasConcept C41823505 @default.
- W2020165996 hasConcept C43617362 @default.
- W2020165996 hasConcept C49040817 @default.
- W2020165996 hasConcept C544956773 @default.
- W2020165996 hasConcept C71987851 @default.
- W2020165996 hasConceptScore W2020165996C113196181 @default.
- W2020165996 hasConceptScore W2020165996C145148216 @default.
- W2020165996 hasConceptScore W2020165996C177322064 @default.
- W2020165996 hasConceptScore W2020165996C178790620 @default.
- W2020165996 hasConceptScore W2020165996C185592680 @default.
- W2020165996 hasConceptScore W2020165996C192562407 @default.
- W2020165996 hasConceptScore W2020165996C41823505 @default.
- W2020165996 hasConceptScore W2020165996C43617362 @default.
- W2020165996 hasConceptScore W2020165996C49040817 @default.
- W2020165996 hasConceptScore W2020165996C544956773 @default.
- W2020165996 hasConceptScore W2020165996C71987851 @default.
- W2020165996 hasIssue "1-4" @default.
- W2020165996 hasLocation W20201659961 @default.
- W2020165996 hasOpenAccess W2020165996 @default.
- W2020165996 hasPrimaryLocation W20201659961 @default.
- W2020165996 hasRelatedWork W170472135 @default.
- W2020165996 hasRelatedWork W1990756950 @default.
- W2020165996 hasRelatedWork W1999043866 @default.
- W2020165996 hasRelatedWork W2016995842 @default.
- W2020165996 hasRelatedWork W2025939068 @default.
- W2020165996 hasRelatedWork W2068956941 @default.
- W2020165996 hasRelatedWork W2105737714 @default.
- W2020165996 hasRelatedWork W2167600288 @default.
- W2020165996 hasRelatedWork W2570600038 @default.
- W2020165996 hasRelatedWork W3101130858 @default.
- W2020165996 hasVolume "112" @default.
- W2020165996 isParatext "false" @default.
- W2020165996 isRetracted "false" @default.
- W2020165996 magId "2020165996" @default.
- W2020165996 workType "article" @default.