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- W2020174241 abstract "This paper discusses the problems involved in obtaining reliable and reproducible thin films of Sb-doped SnO 2 films by the d.c. sputtering process. An attempt to characterize the process is made by correlating the deposition parameters with the factors that contribute to the conductivity of the SnO 2 films. The areas of concern are identified, and guidelines are offered for making the process and the film properties controllable." @default.
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- W2020174241 title "D.C. Sputtering Process: Its Characterization and its Problems When Applied to Tin-Dioxide Thin-Films" @default.
- W2020174241 doi "https://doi.org/10.1155/apec.7.19" @default.
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