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- W2020209791 abstract "The concept of focus blur encompasses the effect of laser bandwidth longitudinal chromatic aberration and scanner stage vertical vibration. The finite bandwidth of excimer laser source causes a corresponding finite distribution of focal planes in a range of 100nm or larger for the optical lithography system. Similarly, scanner vertical stage vibration puts the wafer in a finite distribution of focal planes. Both chromatic aberration and vertical stage vibration could introduce significant CD errors, hence can no longer be ignored in current lithography processes development and OPC development that require CD control within a few nanometers. We developed several methodologies to model the laser chromatic aberration and vertical stage vibration in OPC (Optical Proximity Correction) modeling tool. Extensive simulations were done to calculate chromatic aberration and vertical stage vibration focus blur's impact on lithography patterning for a variety of test structures. Chromatic aberration and vertical stage vibration focus blur effect was further included as an regression term in experimental OPC model calibration to capture its impact on litho patterning, and significant benefit to OPC model calibration was observed." @default.
- W2020209791 created "2016-06-24" @default.
- W2020209791 creator A5001113056 @default.
- W2020209791 creator A5014199632 @default.
- W2020209791 creator A5057243931 @default.
- W2020209791 date "2008-10-24" @default.
- W2020209791 modified "2023-09-23" @default.
- W2020209791 title "Focus blur model to enhance lithography model for optical proximity correction" @default.
- W2020209791 cites W2035139668 @default.
- W2020209791 cites W2085025505 @default.
- W2020209791 cites W2096197745 @default.
- W2020209791 doi "https://doi.org/10.1117/12.802509" @default.
- W2020209791 hasPublicationYear "2008" @default.
- W2020209791 type Work @default.
- W2020209791 sameAs 2020209791 @default.
- W2020209791 citedByCount "0" @default.
- W2020209791 crossrefType "proceedings-article" @default.
- W2020209791 hasAuthorship W2020209791A5001113056 @default.
- W2020209791 hasAuthorship W2020209791A5014199632 @default.
- W2020209791 hasAuthorship W2020209791A5057243931 @default.
- W2020209791 hasConcept C120665830 @default.
- W2020209791 hasConcept C121332964 @default.
- W2020209791 hasConcept C192209626 @default.
- W2020209791 hasConcept C192562407 @default.
- W2020209791 hasConcept C196956537 @default.
- W2020209791 hasConcept C198394728 @default.
- W2020209791 hasConcept C204223013 @default.
- W2020209791 hasConcept C24890656 @default.
- W2020209791 hasConcept C2779751349 @default.
- W2020209791 hasConcept C78371743 @default.
- W2020209791 hasConcept C87367554 @default.
- W2020209791 hasConceptScore W2020209791C120665830 @default.
- W2020209791 hasConceptScore W2020209791C121332964 @default.
- W2020209791 hasConceptScore W2020209791C192209626 @default.
- W2020209791 hasConceptScore W2020209791C192562407 @default.
- W2020209791 hasConceptScore W2020209791C196956537 @default.
- W2020209791 hasConceptScore W2020209791C198394728 @default.
- W2020209791 hasConceptScore W2020209791C204223013 @default.
- W2020209791 hasConceptScore W2020209791C24890656 @default.
- W2020209791 hasConceptScore W2020209791C2779751349 @default.
- W2020209791 hasConceptScore W2020209791C78371743 @default.
- W2020209791 hasConceptScore W2020209791C87367554 @default.
- W2020209791 hasLocation W20202097911 @default.
- W2020209791 hasOpenAccess W2020209791 @default.
- W2020209791 hasPrimaryLocation W20202097911 @default.
- W2020209791 hasRelatedWork W1973427587 @default.
- W2020209791 hasRelatedWork W1980058173 @default.
- W2020209791 hasRelatedWork W2321696034 @default.
- W2020209791 hasRelatedWork W2414272211 @default.
- W2020209791 hasRelatedWork W2473092525 @default.
- W2020209791 hasRelatedWork W2602809857 @default.
- W2020209791 hasRelatedWork W2792821225 @default.
- W2020209791 hasRelatedWork W2896302301 @default.
- W2020209791 hasRelatedWork W2897553265 @default.
- W2020209791 hasRelatedWork W2901693539 @default.
- W2020209791 hasRelatedWork W2945190138 @default.
- W2020209791 hasRelatedWork W2953390458 @default.
- W2020209791 hasRelatedWork W2990299782 @default.
- W2020209791 hasRelatedWork W3030416046 @default.
- W2020209791 hasRelatedWork W3064769678 @default.
- W2020209791 hasRelatedWork W3097178856 @default.
- W2020209791 hasRelatedWork W3102713678 @default.
- W2020209791 hasRelatedWork W3106532380 @default.
- W2020209791 hasRelatedWork W3175755221 @default.
- W2020209791 hasRelatedWork W3157145532 @default.
- W2020209791 isParatext "false" @default.
- W2020209791 isRetracted "false" @default.
- W2020209791 magId "2020209791" @default.
- W2020209791 workType "article" @default.