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- W2020219172 abstract "A method of calculation of ellipsometric parameters, which allows to minimize random errors and simultaneously obtain their covariance matrix, is developed for photometric ellipsometry and polarimetry systems on the basis of Generalized least-squares method (GLSM). As examples of application for rotating compensator ellipsometer the optimum value of retardation of the compensator equal to 132° is calculated, and also the technique of determination of the spectral range is offered. For shot-noise limited systems the basic equation R = D (R)U is obtained, where R is the vector of measured parameters, D (R) is the covariance matrix of these parameters, and U is a constant vector describing the measuring system. All the results are applicable both for Stokes- and for Muller-ellipsometry. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
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- W2020219172 date "2008-05-01" @default.
- W2020219172 modified "2023-10-17" @default.
- W2020219172 title "Random errors and optimum estimation of measurements photometric ellipsometers" @default.
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- W2020219172 doi "https://doi.org/10.1002/pssc.200777830" @default.
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