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- W2020223893 abstract "This paper presents a bistable microfluidic valve with a thermopneumatic actuator that is thermoelectrically driven. A functional prototype is fabricated in silicon technology. The majority of the fabrication process, including the integration of the micro-Peltier devices, is performed at wafer level. The tested valves are switched with ±10 V pulses with an energy input of approximately 1 J for closing and 2 J for opening the valve. Leak rates below 1 ¿l/min are measured for inlet pressures up to 100 kPa." @default.
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- W2020223893 date "2010-01-01" @default.
- W2020223893 modified "2023-09-27" @default.
- W2020223893 title "Bistable silicon microvalve with thermoelectrically driven thermopneumatic actuator for liquid flow control" @default.
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- W2020223893 doi "https://doi.org/10.1109/memsys.2010.5442417" @default.
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