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- W2020421819 abstract "Atmospheric pressure metalorganic vapour phase epitaxy (MOVPE) has been used to prepare high purity AlGaAs from methyl metalorganic precursors and arsine. A low background concentration for carbon and oxygen was realized using a growth temperature of 600°C and processing of the metalorganic precursors using reactive metals dissolved in gallium. Comparisons have been made with unprocessed alkyl reagents using 10 K photoluminescence. A reduction of both carbon and oxygen through purification suggests alkoxide contamination is suppressed by this technique. MOVPE growth using oxygen gettering for all precursors has been applied to visible AlGaAs laser diodes. A 712 nm double quantum well design operating CW resulted in a maximum output power of 176mW/facet from an uncoated laser device with a 400 μ m×100 μ m oxide defined stripe." @default.
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- W2020421819 date "1994-10-01" @default.
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- W2020421819 title "High purity AlGaAs from methyl-based precursors using in situ gettering of alkoxides" @default.
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- W2020421819 doi "https://doi.org/10.1016/0022-0248(94)90048-5" @default.
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