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- W2020430015 abstract "We fabricated a quartz crystal microbalance (QCM) coated with inorganic films for volatile organic compound (VOC) gas sensing. The deposited materials were SiO2, TiO2, and Al2O3. Inorganic films were formed on a quartz electrode by pulsed laser deposition (PLD) and/or a sol–gel method. The TiO2 film had the highest sensitivity due to its large surface area. VOC gases were dichloromethane, carbon tetrachloride and toluene. Toluene showed the largest amount of adsorption onto the inorganic films. Sol–gel-coated TiO2 had about quintuple sensitivity, compared with PLD-coated TiO2." @default.
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- W2020430015 date "2008-01-22" @default.
- W2020430015 modified "2023-09-27" @default.
- W2020430015 title "Volatile Organic Compound Gas Sensing Using Quartz Crystal Microbalance with Inorganic Films Coated by Pulsed Laser Deposition" @default.
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- W2020430015 doi "https://doi.org/10.1143/jjap.47.637" @default.
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