FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2020444872> ?p ?o ?g. }

• W2020444872 endingPage "496" @default.
• W2020444872 startingPage "491" @default.
• W2020444872 abstract "Al-doped ZnO film on glass substrate is deposited by ALD in low temperature, using 4-step process (DEZ-<TEX>$H_2O$</TEX>-TMA-<TEX>$H_2O$</TEX>). To find out the optimal film condition for TCO material, we fabricate Al-doped ZnO films by increasing Al doping concentration at <TEX>$100^{circ}C$</TEX>, so that the Al-doped film of 5 at% shows the lowest resistivity (<TEX>$1.057{times}10^{-2}{Omega}{cdot}cm$</TEX>) and the largest grain size (38.047 nm). Afterwards, the electrical and physical characteristics in Al-doped films of 5 at% are also compared in accordance with increasing deposition temperature. All the films show the optical transmittance over 80% and the film deposited at <TEX>$250^{circ}C$</TEX> demonstrates the superior resistivity (<TEX>$1.237{times}10^{-4}{Omega}{cdot}cm$</TEX>)." @default.
• W2020444872 created "2016-06-24" @default.
• W2020444872 creator A5016496128 @default.
• W2020444872 creator A5039775555 @default.
• W2020444872 creator A5048377496 @default.
• W2020444872 creator A5052439186 @default.
• W2020444872 creator A5066534237 @default.
• W2020444872 creator A5069275786 @default.
• W2020444872 creator A5078121190 @default.
• W2020444872 creator A5091905190 @default.
• W2020444872 date "2011-06-01" @default.
• W2020444872 modified "2023-09-27" @default.
• W2020444872 title "Electrical, Structural and Optical Characteristic Analysis of Al-doped ZnO Film Deposited by Atomic Layer Deposition" @default.
• W2020444872 cites W1967048546 @default.
• W2020444872 cites W1977333046 @default.
• W2020444872 cites W1985809713 @default.
• W2020444872 cites W1985894696 @default.
• W2020444872 cites W1987134634 @default.
• W2020444872 cites W1995045844 @default.
• W2020444872 cites W2024025132 @default.
• W2020444872 cites W2025490475 @default.
• W2020444872 cites W2028761358 @default.
• W2020444872 cites W2052414297 @default.
• W2020444872 cites W2054043633 @default.
• W2020444872 cites W2081018457 @default.
• W2020444872 cites W2106732702 @default.
• W2020444872 cites W2168658650 @default.
• W2020444872 doi "https://doi.org/10.4313/jkem.2011.24.6.491" @default.
• W2020444872 hasPublicationYear "2011" @default.
• W2020444872 type Work @default.
• W2020444872 sameAs 2020444872 @default.
• W2020444872 citedByCount "2" @default.
• W2020444872 countsByYear W20204448722013 @default.
• W2020444872 countsByYear W20204448722019 @default.
• W2020444872 crossrefType "journal-article" @default.
• W2020444872 hasAuthorship W2020444872A5016496128 @default.
• W2020444872 hasAuthorship W2020444872A5039775555 @default.
• W2020444872 hasAuthorship W2020444872A5048377496 @default.
• W2020444872 hasAuthorship W2020444872A5052439186 @default.
• W2020444872 hasAuthorship W2020444872A5066534237 @default.
• W2020444872 hasAuthorship W2020444872A5069275786 @default.
• W2020444872 hasAuthorship W2020444872A5078121190 @default.
• W2020444872 hasAuthorship W2020444872A5091905190 @default.
• W2020444872 hasBestOaLocation W20204448721 @default.
• W2020444872 hasConcept C111368507 @default.
• W2020444872 hasConcept C113196181 @default.
• W2020444872 hasConcept C119599485 @default.
• W2020444872 hasConcept C121332964 @default.
• W2020444872 hasConcept C127313418 @default.
• W2020444872 hasConcept C127413603 @default.
• W2020444872 hasConcept C150493377 @default.
• W2020444872 hasConcept C151730666 @default.
• W2020444872 hasConcept C159985019 @default.
• W2020444872 hasConcept C171250308 @default.
• W2020444872 hasConcept C185592680 @default.
• W2020444872 hasConcept C19067145 @default.
• W2020444872 hasConcept C192191005 @default.
• W2020444872 hasConcept C192562407 @default.
• W2020444872 hasConcept C199289684 @default.
• W2020444872 hasConcept C2777289219 @default.
• W2020444872 hasConcept C2779227376 @default.
• W2020444872 hasConcept C2779557605 @default.
• W2020444872 hasConcept C2816523 @default.
• W2020444872 hasConcept C43617362 @default.
• W2020444872 hasConcept C49040817 @default.
• W2020444872 hasConcept C57863236 @default.
• W2020444872 hasConcept C62520636 @default.
• W2020444872 hasConcept C64297162 @default.
• W2020444872 hasConcept C69544855 @default.
• W2020444872 hasConcept C69990965 @default.
• W2020444872 hasConcept C86803240 @default.
• W2020444872 hasConceptScore W2020444872C111368507 @default.
• W2020444872 hasConceptScore W2020444872C113196181 @default.
• W2020444872 hasConceptScore W2020444872C119599485 @default.
• W2020444872 hasConceptScore W2020444872C121332964 @default.
• W2020444872 hasConceptScore W2020444872C127313418 @default.
• W2020444872 hasConceptScore W2020444872C127413603 @default.
• W2020444872 hasConceptScore W2020444872C150493377 @default.
• W2020444872 hasConceptScore W2020444872C151730666 @default.
• W2020444872 hasConceptScore W2020444872C159985019 @default.
• W2020444872 hasConceptScore W2020444872C171250308 @default.
• W2020444872 hasConceptScore W2020444872C185592680 @default.
• W2020444872 hasConceptScore W2020444872C19067145 @default.
• W2020444872 hasConceptScore W2020444872C192191005 @default.
• W2020444872 hasConceptScore W2020444872C192562407 @default.
• W2020444872 hasConceptScore W2020444872C199289684 @default.
• W2020444872 hasConceptScore W2020444872C2777289219 @default.
• W2020444872 hasConceptScore W2020444872C2779227376 @default.
• W2020444872 hasConceptScore W2020444872C2779557605 @default.
• W2020444872 hasConceptScore W2020444872C2816523 @default.
• W2020444872 hasConceptScore W2020444872C43617362 @default.
• W2020444872 hasConceptScore W2020444872C49040817 @default.
• W2020444872 hasConceptScore W2020444872C57863236 @default.
• W2020444872 hasConceptScore W2020444872C62520636 @default.
• W2020444872 hasConceptScore W2020444872C64297162 @default.
• W2020444872 hasConceptScore W2020444872C69544855 @default.
• W2020444872 hasConceptScore W2020444872C69990965 @default.
• W2020444872 hasConceptScore W2020444872C86803240 @default.

• next