Matches in SemOpenAlex for { <https://semopenalex.org/work/W2020455866> ?p ?o ?g. }
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- W2020455866 endingPage "41" @default.
- W2020455866 startingPage "39" @default.
- W2020455866 abstract "Outdiffusion profiles of nitrogen in silicon were measured by secondary ion mass spectrometry to determine its diffusion coefficient in a temperature range of 800–1200 °C. The total amount of the nitrogen outdiffusion agrees with the change in infrared absorption by heat treatment. The experimental results give the diffusion coefficient of nitrogen as D=2.7×103 exp(−2.8eV/kT)cm2/s. This value is five orders of magnitude larger compared with the reported expression of 0.87 exp(−3.29eV/kT)cm2/s. Nitrogen–nitrogen-pair-like molecule in crystals corresponds to the former value and substitutional nitrogen atom to the latter one. These two types of nitrogen in silicon may allow us to clarify the various effects of nitrogen such as strengthening of crystals and suppression of swirls and D-defect generation." @default.
- W2020455866 created "2016-06-24" @default.
- W2020455866 creator A5001790728 @default.
- W2020455866 creator A5028163922 @default.
- W2020455866 date "1988-07-04" @default.
- W2020455866 modified "2023-10-02" @default.
- W2020455866 title "Diffusion coefficient of a pair of nitrogen atoms in float-zone silicon" @default.
- W2020455866 cites W1984242131 @default.
- W2020455866 cites W2058654823 @default.
- W2020455866 cites W2061896604 @default.
- W2020455866 cites W2063785158 @default.
- W2020455866 cites W2073067861 @default.
- W2020455866 cites W2123225159 @default.
- W2020455866 doi "https://doi.org/10.1063/1.100116" @default.
- W2020455866 hasPublicationYear "1988" @default.
- W2020455866 type Work @default.
- W2020455866 sameAs 2020455866 @default.
- W2020455866 citedByCount "111" @default.
- W2020455866 countsByYear W20204558662012 @default.
- W2020455866 countsByYear W20204558662013 @default.
- W2020455866 countsByYear W20204558662014 @default.
- W2020455866 countsByYear W20204558662015 @default.
- W2020455866 countsByYear W20204558662016 @default.
- W2020455866 countsByYear W20204558662017 @default.
- W2020455866 countsByYear W20204558662018 @default.
- W2020455866 countsByYear W20204558662019 @default.
- W2020455866 countsByYear W20204558662020 @default.
- W2020455866 countsByYear W20204558662021 @default.
- W2020455866 countsByYear W20204558662022 @default.
- W2020455866 crossrefType "journal-article" @default.
- W2020455866 hasAuthorship W2020455866A5001790728 @default.
- W2020455866 hasAuthorship W2020455866A5028163922 @default.
- W2020455866 hasConcept C113196181 @default.
- W2020455866 hasConcept C121332964 @default.
- W2020455866 hasConcept C125287762 @default.
- W2020455866 hasConcept C145148216 @default.
- W2020455866 hasConcept C159985019 @default.
- W2020455866 hasConcept C162356407 @default.
- W2020455866 hasConcept C178790620 @default.
- W2020455866 hasConcept C184779094 @default.
- W2020455866 hasConcept C185592680 @default.
- W2020455866 hasConcept C192562407 @default.
- W2020455866 hasConcept C39353612 @default.
- W2020455866 hasConcept C43617362 @default.
- W2020455866 hasConcept C537208039 @default.
- W2020455866 hasConcept C544956773 @default.
- W2020455866 hasConcept C69357855 @default.
- W2020455866 hasConcept C97355855 @default.
- W2020455866 hasConceptScore W2020455866C113196181 @default.
- W2020455866 hasConceptScore W2020455866C121332964 @default.
- W2020455866 hasConceptScore W2020455866C125287762 @default.
- W2020455866 hasConceptScore W2020455866C145148216 @default.
- W2020455866 hasConceptScore W2020455866C159985019 @default.
- W2020455866 hasConceptScore W2020455866C162356407 @default.
- W2020455866 hasConceptScore W2020455866C178790620 @default.
- W2020455866 hasConceptScore W2020455866C184779094 @default.
- W2020455866 hasConceptScore W2020455866C185592680 @default.
- W2020455866 hasConceptScore W2020455866C192562407 @default.
- W2020455866 hasConceptScore W2020455866C39353612 @default.
- W2020455866 hasConceptScore W2020455866C43617362 @default.
- W2020455866 hasConceptScore W2020455866C537208039 @default.
- W2020455866 hasConceptScore W2020455866C544956773 @default.
- W2020455866 hasConceptScore W2020455866C69357855 @default.
- W2020455866 hasConceptScore W2020455866C97355855 @default.
- W2020455866 hasIssue "1" @default.
- W2020455866 hasLocation W20204558661 @default.
- W2020455866 hasOpenAccess W2020455866 @default.
- W2020455866 hasPrimaryLocation W20204558661 @default.
- W2020455866 hasRelatedWork W2005161516 @default.
- W2020455866 hasRelatedWork W2026642978 @default.
- W2020455866 hasRelatedWork W2034817111 @default.
- W2020455866 hasRelatedWork W2038285257 @default.
- W2020455866 hasRelatedWork W2047145346 @default.
- W2020455866 hasRelatedWork W2151138508 @default.
- W2020455866 hasRelatedWork W2312552982 @default.
- W2020455866 hasRelatedWork W2381120434 @default.
- W2020455866 hasRelatedWork W2899084033 @default.
- W2020455866 hasRelatedWork W3036157976 @default.
- W2020455866 hasVolume "53" @default.
- W2020455866 isParatext "false" @default.
- W2020455866 isRetracted "false" @default.
- W2020455866 magId "2020455866" @default.
- W2020455866 workType "article" @default.