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• W2020603972 endingPage "598" @default.
• W2020603972 startingPage "594" @default.
• W2020603972 abstract "Extremely smooth iridium (Ir) thin films were deposited on Si(1 0 0) substrate at lower temperature than 300 °C by pulsed laser deposition (PLD) technique using Ir target in a vacuum atmosphere. The crystal orientation, surface morphology, and resistivity of the Ir thin films were systematically determined as a function of substrate temperature. Well-crystallized and single-phase Ir thin films with (1 1 1) preferred orientation were obtained at substrate temperature of 200–300 °C. The surface roughness increased with the increasing of substrate temperature. Likewise, the room-temperature resistivity of Ir thin films decreased with increasing substrate temperature, showing a low value of (10.7±0.1) μΩ cm at 300 °C." @default.
• W2020603972 created "2016-06-24" @default.
• W2020603972 creator A5008449115 @default.
• W2020603972 creator A5044955952 @default.
• W2020603972 creator A5050386033 @default.
• W2020603972 creator A5065761378 @default.
• W2020603972 date "2008-02-01" @default.
• W2020603972 modified "2023-10-14" @default.
• W2020603972 title "Low-temperature deposition of iridium thin films by pulsed laser deposition" @default.
• W2020603972 cites W1990556220 @default.
• W2020603972 cites W2002403981 @default.
• W2020603972 cites W2014148646 @default.
• W2020603972 cites W2028048077 @default.
• W2020603972 cites W2033375714 @default.
• W2020603972 cites W2035187377 @default.
• W2020603972 cites W2052736640 @default.
• W2020603972 cites W2059391533 @default.
• W2020603972 cites W2060013522 @default.
• W2020603972 cites W2062285608 @default.
• W2020603972 cites W2063558818 @default.
• W2020603972 cites W2070984838 @default.
• W2020603972 cites W2087143362 @default.
• W2020603972 cites W2129659057 @default.
• W2020603972 cites W2143410452 @default.
• W2020603972 cites W2168061545 @default.
• W2020603972 cites W4246225617 @default.
• W2020603972 doi "https://doi.org/10.1016/j.vacuum.2007.09.003" @default.
• W2020603972 hasPublicationYear "2008" @default.
• W2020603972 type Work @default.
• W2020603972 sameAs 2020603972 @default.
• W2020603972 citedByCount "28" @default.
• W2020603972 countsByYear W20206039722012 @default.
• W2020603972 countsByYear W20206039722013 @default.
• W2020603972 countsByYear W20206039722014 @default.
• W2020603972 countsByYear W20206039722016 @default.
• W2020603972 countsByYear W20206039722017 @default.
• W2020603972 countsByYear W20206039722018 @default.
• W2020603972 countsByYear W20206039722019 @default.
• W2020603972 countsByYear W20206039722020 @default.
• W2020603972 countsByYear W20206039722021 @default.
• W2020603972 countsByYear W20206039722022 @default.
• W2020603972 countsByYear W20206039722023 @default.
• W2020603972 crossrefType "journal-article" @default.
• W2020603972 hasAuthorship W2020603972A5008449115 @default.
• W2020603972 hasAuthorship W2020603972A5044955952 @default.
• W2020603972 hasAuthorship W2020603972A5050386033 @default.
• W2020603972 hasAuthorship W2020603972A5065761378 @default.
• W2020603972 hasConcept C107365816 @default.
• W2020603972 hasConcept C111368507 @default.
• W2020603972 hasConcept C113196181 @default.
• W2020603972 hasConcept C119599485 @default.
• W2020603972 hasConcept C127313418 @default.
• W2020603972 hasConcept C127413603 @default.
• W2020603972 hasConcept C151730666 @default.
• W2020603972 hasConcept C159985019 @default.
• W2020603972 hasConcept C161790260 @default.
• W2020603972 hasConcept C171250308 @default.
• W2020603972 hasConcept C185592680 @default.
• W2020603972 hasConcept C19067145 @default.
• W2020603972 hasConcept C192562407 @default.
• W2020603972 hasConcept C2777289219 @default.
• W2020603972 hasConcept C2816523 @default.
• W2020603972 hasConcept C37982897 @default.
• W2020603972 hasConcept C43617362 @default.
• W2020603972 hasConcept C528581852 @default.
• W2020603972 hasConcept C55493867 @default.
• W2020603972 hasConcept C64297162 @default.
• W2020603972 hasConcept C69990965 @default.
• W2020603972 hasConceptScore W2020603972C107365816 @default.
• W2020603972 hasConceptScore W2020603972C111368507 @default.
• W2020603972 hasConceptScore W2020603972C113196181 @default.
• W2020603972 hasConceptScore W2020603972C119599485 @default.
• W2020603972 hasConceptScore W2020603972C127313418 @default.
• W2020603972 hasConceptScore W2020603972C127413603 @default.
• W2020603972 hasConceptScore W2020603972C151730666 @default.
• W2020603972 hasConceptScore W2020603972C159985019 @default.
• W2020603972 hasConceptScore W2020603972C161790260 @default.
• W2020603972 hasConceptScore W2020603972C171250308 @default.
• W2020603972 hasConceptScore W2020603972C185592680 @default.
• W2020603972 hasConceptScore W2020603972C19067145 @default.
• W2020603972 hasConceptScore W2020603972C192562407 @default.
• W2020603972 hasConceptScore W2020603972C2777289219 @default.
• W2020603972 hasConceptScore W2020603972C2816523 @default.
• W2020603972 hasConceptScore W2020603972C37982897 @default.
• W2020603972 hasConceptScore W2020603972C43617362 @default.
• W2020603972 hasConceptScore W2020603972C528581852 @default.
• W2020603972 hasConceptScore W2020603972C55493867 @default.
• W2020603972 hasConceptScore W2020603972C64297162 @default.
• W2020603972 hasConceptScore W2020603972C69990965 @default.
• W2020603972 hasIssue "6" @default.
• W2020603972 hasLocation W20206039721 @default.
• W2020603972 hasOpenAccess W2020603972 @default.
• W2020603972 hasPrimaryLocation W20206039721 @default.
• W2020603972 hasRelatedWork W1779249657 @default.
• W2020603972 hasRelatedWork W2012783318 @default.
• W2020603972 hasRelatedWork W2035865932 @default.
• W2020603972 hasRelatedWork W2044527105 @default.
• W2020603972 hasRelatedWork W2057185306 @default.

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