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• W2020608220 abstract "In this article we compare the results of micromachining of fused silica and silicon with tightly focused scalar (viz., circularly and linearly polarized) and vector (viz., azimuthally and radially polarized) femtosecond laser pulses. We show that drilling with radially polarized pulses produces holes with smoother and better-delineated walls compared with the other polarizations used, whereas linearly polarized pulses can machine 20-nm wide single grooves in fused silica when the electric field of the pulse is aligned perpendicular to the cutting direction. The observed polarization-controlled micromachining is due to the formation of sub-diffraction-limited nanostructures that are optically produced in the multi-pulse irradiation regime." @default.
• W2020608220 created "2016-06-24" @default.
• W2020608220 creator A5009321969 @default.
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• W2020608220 date "2013-05-16" @default.
• W2020608220 modified "2023-10-14" @default.
• W2020608220 title "The role of light-induced nanostructures in femtosecond laser micromachining with vector and scalar pulses" @default.
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• W2020608220 doi "https://doi.org/10.1364/oe.21.012651" @default.
• W2020608220 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/23736485" @default.
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