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- W2020656812 abstract "A modular system of SiC-based microhotplates with integrated IDC for the use in metal oxide gas sensors is presented. Basic building block of the sensors is a 1 μm thick polycrystalline 3C-SiC membrane, which acts as supporting structure. A 200 nm thick HfB2 thin film heater with a dc-resistance of about 12 Ω (1–2 V operating voltage) or alternatively an N-doped area in the SiC-membrane (12 V operating voltage) is used as hotplate. The active part of the membrane is separated from the surrounding membrane by six SiC-microbridges of 150 μm length and widths of 10, 20 and 40 μm. The heater is designed for operating temperatures up to 700°C and can be operated at about 400°C with a power of 35 mW." @default.
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- W2020656812 date "2000-06-01" @default.
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- W2020656812 title "A modular system of SiC-based microhotplates for the application in metal oxide gas sensors" @default.
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- W2020656812 doi "https://doi.org/10.1016/s0925-4005(99)00490-6" @default.
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