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• W2020691976 abstract "Residual compressive stress due to plume-induced energetic particle bombardment in CeO2 films deposited by pulsed-laser deposition is reported. For laser ablation film growth in low pressures, stresses as high as 2 GPa were observed as determined by substrate curvature and four-circle x-ray diffraction. The amount of stress in the films could be manipulated by controlling the kinetic energies of the ablated species in the plume through gas-phase collisions with an inert background gas. The film stress decreased to near zero for argon background pressures greater than 50 mTorr. At these higher background pressures, the formation of nanoparticles in the deposited film was observed." @default.
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• W2020691976 date "1999-04-12" @default.
• W2020691976 modified "2023-10-14" @default.
• W2020691976 title "Plume-induced stress in pulsed-laser deposited CeO2 films" @default.
• W2020691976 cites W140004604 @default.
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• W2020691976 doi "https://doi.org/10.1063/1.123780" @default.
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