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- W2020693912 abstract "In this paper, a disk piezoelectric actuator structure - 4-9-9-14 piezoelectric actuator is constructed, and it is made of piezoelectric buzzer to drive a novel biaxial piezoelectric actuated stage. The 4-9-9-14 piezoelectric actuator offers a better balanced capability of forward rotation and reverse rotation than the conventional edge-driving piezoelectric actuator. The biaxial piezoelectric actuated stage structure comprises a base, a V-shaped guide rail, an optical scale measurement system, a preload adjusting structure, and a load-carrying stage. The movement of a stage is read and analyzed by means of LabVIEW operating in conjunction with an optical scale. Stage movement-related signals read by the optical scale are processed. With a human-machine interface of LabVIEW, the movement of the stage is depicted by a waveform chart to thereby facilitate the observation of the waveform chart and the understanding of propulsion of the stage by the actuator." @default.
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- W2020693912 date "2013-09-01" @default.
- W2020693912 modified "2023-10-16" @default.
- W2020693912 title "Structure Design of a Novel Biaxial Piezoelectric Actuated Stage" @default.
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- W2020693912 doi "https://doi.org/10.4028/www.scientific.net/amr.765-767.96" @default.
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