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• W2020703013 abstract "Antimony oxide and sulfide are obtained in atomic layer deposition (ALD) mode by reaction of tris(dimethylamido)-antimony with ozone or hydrogen sulfide at mild temperatures and with large growth rates. Thin films deposited with those methods are chemically pure and stoichiometric. Nanostructures of large aspect ratios are also accessible." @default.
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• W2020703013 date "2009-05-29" @default.
• W2020703013 modified "2023-10-03" @default.
• W2020703013 title "Atomic Layer Deposition of Antimony Oxide and Antimony Sulfide" @default.
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• W2020703013 doi "https://doi.org/10.1021/cm900623v" @default.
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