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- W2020709894 abstract "Semiconductor yield can be greatly affected by defective photomasks. Various methods of detection of photomask defects have been investigated in the past. This paper discusses some methods available for the detection of random defects and describes a newly developed automatic mask inspection system." @default.
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- W2020709894 date "1977-08-08" @default.
- W2020709894 modified "2023-09-23" @default.
- W2020709894 title "<title>Automatic Inspection Of Mask Defects</title>" @default.
- W2020709894 doi "https://doi.org/10.1117/12.955350" @default.
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