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- W2020763656 endingPage "1487" @default.
- W2020763656 startingPage "1481" @default.
- W2020763656 abstract "The diffusion enhanced silylated resist (DESIRE) process has been presented as one of the most attractive surface imaging technologies for advanced optical lithography. It has been shown that the silylation step, usually carried out in a hexamethyldisilazane (HMDS) ambient, is one of the more critical steps in the process. In this paper an in-depth study of the silylation is presented. Several alternative mono- and polyfunctional silylating agents are evaluated for application in the DESIRE process. DMSDMA, TMSDMA, and TMDS are promising candidates, showing several advantages over HMDS. For the case of HMDS and TMDS, the kinetics of the silylation are additionally studied using Rutherford backscattering spectroscopy, Auger electron spectroscopy, and infrared measurements for various process conditions. In an earlier study we have reported lateral swelling for silylation with HMDS resulting from volume expansion of the silylated resist. Because of the reduced volume expansion and/or the lower silylation temperature, these alternative silylating agents reduce the swelling and surface roughness. It has been observed that the silylation process window can be greatly increased by optimizing the presilylation bake." @default.
- W2020763656 created "2016-06-24" @default.
- W2020763656 creator A5054586884 @default.
- W2020763656 date "1990-11-01" @default.
- W2020763656 modified "2023-10-17" @default.
- W2020763656 title "Gas phase silylation in the diffusion enhanced silylated resist process for application to sub-0.5 μm optical lithography" @default.
- W2020763656 doi "https://doi.org/10.1116/1.585101" @default.
- W2020763656 hasPublicationYear "1990" @default.
- W2020763656 type Work @default.
- W2020763656 sameAs 2020763656 @default.
- W2020763656 citedByCount "13" @default.
- W2020763656 countsByYear W20207636562015 @default.
- W2020763656 countsByYear W20207636562018 @default.
- W2020763656 countsByYear W20207636562019 @default.
- W2020763656 countsByYear W20207636562020 @default.
- W2020763656 crossrefType "journal-article" @default.
- W2020763656 hasAuthorship W2020763656A5054586884 @default.
- W2020763656 hasConcept C121332964 @default.
- W2020763656 hasConcept C127413603 @default.
- W2020763656 hasConcept C159985019 @default.
- W2020763656 hasConcept C161790260 @default.
- W2020763656 hasConcept C171250308 @default.
- W2020763656 hasConcept C178790620 @default.
- W2020763656 hasConcept C185544564 @default.
- W2020763656 hasConcept C185592680 @default.
- W2020763656 hasConcept C192562407 @default.
- W2020763656 hasConcept C204223013 @default.
- W2020763656 hasConcept C25442681 @default.
- W2020763656 hasConcept C2778540859 @default.
- W2020763656 hasConcept C2779227376 @default.
- W2020763656 hasConcept C42360764 @default.
- W2020763656 hasConcept C49040817 @default.
- W2020763656 hasConcept C5304478 @default.
- W2020763656 hasConcept C53524968 @default.
- W2020763656 hasConcept C69357855 @default.
- W2020763656 hasConcept C97355855 @default.
- W2020763656 hasConceptScore W2020763656C121332964 @default.
- W2020763656 hasConceptScore W2020763656C127413603 @default.
- W2020763656 hasConceptScore W2020763656C159985019 @default.
- W2020763656 hasConceptScore W2020763656C161790260 @default.
- W2020763656 hasConceptScore W2020763656C171250308 @default.
- W2020763656 hasConceptScore W2020763656C178790620 @default.
- W2020763656 hasConceptScore W2020763656C185544564 @default.
- W2020763656 hasConceptScore W2020763656C185592680 @default.
- W2020763656 hasConceptScore W2020763656C192562407 @default.
- W2020763656 hasConceptScore W2020763656C204223013 @default.
- W2020763656 hasConceptScore W2020763656C25442681 @default.
- W2020763656 hasConceptScore W2020763656C2778540859 @default.
- W2020763656 hasConceptScore W2020763656C2779227376 @default.
- W2020763656 hasConceptScore W2020763656C42360764 @default.
- W2020763656 hasConceptScore W2020763656C49040817 @default.
- W2020763656 hasConceptScore W2020763656C5304478 @default.
- W2020763656 hasConceptScore W2020763656C53524968 @default.
- W2020763656 hasConceptScore W2020763656C69357855 @default.
- W2020763656 hasConceptScore W2020763656C97355855 @default.
- W2020763656 hasIssue "6" @default.
- W2020763656 hasLocation W20207636561 @default.
- W2020763656 hasOpenAccess W2020763656 @default.
- W2020763656 hasPrimaryLocation W20207636561 @default.
- W2020763656 hasRelatedWork W2046671429 @default.
- W2020763656 hasRelatedWork W2049803208 @default.
- W2020763656 hasRelatedWork W2059618181 @default.
- W2020763656 hasRelatedWork W2092552557 @default.
- W2020763656 hasRelatedWork W2097947603 @default.
- W2020763656 hasRelatedWork W2144942665 @default.
- W2020763656 hasRelatedWork W2149730613 @default.
- W2020763656 hasRelatedWork W2165893534 @default.
- W2020763656 hasRelatedWork W4211172441 @default.
- W2020763656 hasRelatedWork W2571864778 @default.
- W2020763656 hasVolume "8" @default.
- W2020763656 isParatext "false" @default.
- W2020763656 isRetracted "false" @default.
- W2020763656 magId "2020763656" @default.
- W2020763656 workType "article" @default.