Matches in SemOpenAlex for { <https://semopenalex.org/work/W2020835143> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W2020835143 abstract "The challenges of the 65 nm node and beyond require new formulations of the compact convolution models used in OPC. In addition to simulating more optical and resist effects, these models must accommodate pattern distortions due to etch which can no longer be treated as small perturbations on photo-lithographic effects. (Methods for combining optical and process modules while optimizing the speed/accuracy tradeoff were described in “Advanced Model Formulations for Optical and Process Proximity Correction”, D. Beale et al, SPIE 2004.) In this paper, we evaluate new physics-based etch model formulations that differ from the convolution-based process models used previously. The new models are expressed within the compact modeling framework described by J. Stirniman <i>et al.</i> in SPIE, vol. 3051, p469, 1997, and thus can be used for high-speed process simulation during full-chip OPC." @default.
- W2020835143 created "2016-06-24" @default.
- W2020835143 creator A5061380887 @default.
- W2020835143 creator A5065626502 @default.
- W2020835143 date "2005-06-28" @default.
- W2020835143 modified "2023-09-26" @default.
- W2020835143 title "Etch modeling in RET synthesis and verification flow" @default.
- W2020835143 doi "https://doi.org/10.1117/12.617143" @default.
- W2020835143 hasPublicationYear "2005" @default.
- W2020835143 type Work @default.
- W2020835143 sameAs 2020835143 @default.
- W2020835143 citedByCount "2" @default.
- W2020835143 crossrefType "proceedings-article" @default.
- W2020835143 hasAuthorship W2020835143A5061380887 @default.
- W2020835143 hasAuthorship W2020835143A5065626502 @default.
- W2020835143 hasConcept C105487726 @default.
- W2020835143 hasConcept C111919701 @default.
- W2020835143 hasConcept C11413529 @default.
- W2020835143 hasConcept C120665830 @default.
- W2020835143 hasConcept C121332964 @default.
- W2020835143 hasConcept C127413603 @default.
- W2020835143 hasConcept C154945302 @default.
- W2020835143 hasConcept C171250308 @default.
- W2020835143 hasConcept C192562407 @default.
- W2020835143 hasConcept C204223013 @default.
- W2020835143 hasConcept C24326235 @default.
- W2020835143 hasConcept C24890656 @default.
- W2020835143 hasConcept C2779227376 @default.
- W2020835143 hasConcept C41008148 @default.
- W2020835143 hasConcept C45347329 @default.
- W2020835143 hasConcept C46362747 @default.
- W2020835143 hasConcept C4775677 @default.
- W2020835143 hasConcept C50644808 @default.
- W2020835143 hasConcept C53524968 @default.
- W2020835143 hasConcept C62611344 @default.
- W2020835143 hasConcept C78371743 @default.
- W2020835143 hasConcept C98045186 @default.
- W2020835143 hasConceptScore W2020835143C105487726 @default.
- W2020835143 hasConceptScore W2020835143C111919701 @default.
- W2020835143 hasConceptScore W2020835143C11413529 @default.
- W2020835143 hasConceptScore W2020835143C120665830 @default.
- W2020835143 hasConceptScore W2020835143C121332964 @default.
- W2020835143 hasConceptScore W2020835143C127413603 @default.
- W2020835143 hasConceptScore W2020835143C154945302 @default.
- W2020835143 hasConceptScore W2020835143C171250308 @default.
- W2020835143 hasConceptScore W2020835143C192562407 @default.
- W2020835143 hasConceptScore W2020835143C204223013 @default.
- W2020835143 hasConceptScore W2020835143C24326235 @default.
- W2020835143 hasConceptScore W2020835143C24890656 @default.
- W2020835143 hasConceptScore W2020835143C2779227376 @default.
- W2020835143 hasConceptScore W2020835143C41008148 @default.
- W2020835143 hasConceptScore W2020835143C45347329 @default.
- W2020835143 hasConceptScore W2020835143C46362747 @default.
- W2020835143 hasConceptScore W2020835143C4775677 @default.
- W2020835143 hasConceptScore W2020835143C50644808 @default.
- W2020835143 hasConceptScore W2020835143C53524968 @default.
- W2020835143 hasConceptScore W2020835143C62611344 @default.
- W2020835143 hasConceptScore W2020835143C78371743 @default.
- W2020835143 hasConceptScore W2020835143C98045186 @default.
- W2020835143 hasLocation W20208351431 @default.
- W2020835143 hasOpenAccess W2020835143 @default.
- W2020835143 hasPrimaryLocation W20208351431 @default.
- W2020835143 hasRelatedWork W1968817737 @default.
- W2020835143 hasRelatedWork W2000358180 @default.
- W2020835143 hasRelatedWork W2006819482 @default.
- W2020835143 hasRelatedWork W2009562288 @default.
- W2020835143 hasRelatedWork W2020835143 @default.
- W2020835143 hasRelatedWork W2029285512 @default.
- W2020835143 hasRelatedWork W2032410534 @default.
- W2020835143 hasRelatedWork W2054036902 @default.
- W2020835143 hasRelatedWork W2061162966 @default.
- W2020835143 hasRelatedWork W4311414285 @default.
- W2020835143 isParatext "false" @default.
- W2020835143 isRetracted "false" @default.
- W2020835143 magId "2020835143" @default.
- W2020835143 workType "article" @default.