FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2021000452> ?p ?o ?g. }

• W2021000452 endingPage "2904" @default.
• W2021000452 startingPage "2902" @default.
• W2021000452 abstract "The microstructural and electrical properties of Ge-based metal–oxide–semiconductor capacitors containing high-k gate dielectric layers were investigated with and without the presence of a GeOxNy interface layer. The effect of this nitrided layer on thermal stability of the metal oxide/Ge structures was probed by medium energy ion energy spectroscopy (MEIS). Atomic-layer deposited HfO2 on a chemical oxide-terminated Ge (100) surface exhibited poor capacitance–voltage behavior; however, direct substrate surface nitridation at 600°C in NH3 ambient before HfO2 deposition improved the carrier trapping characteristics. Diffusion of metal impurities (including Hf) into the interfacial oxide/Ge-substrate may be an important source of the measured degradation of electrical properties. MEIS results suggested that the GeOxNy interface layer may inhibit Hf diffusion into the underlying semiconductor at the temperatures investigated." @default.
• W2021000452 created "2016-06-24" @default.
• W2021000452 creator A5028907255 @default.
• W2021000452 creator A5038313734 @default.
• W2021000452 creator A5065754731 @default.
• W2021000452 creator A5071603212 @default.
• W2021000452 creator A5087475048 @default.
• W2021000452 date "2004-10-04" @default.
• W2021000452 modified "2023-10-18" @default.
• W2021000452 title "Interfacial characteristics of HfO2 grown on nitrided Ge (100) substrates by atomic-layer deposition" @default.
• W2021000452 cites W1987351860 @default.
• W2021000452 cites W1987730200 @default.
• W2021000452 cites W2008027055 @default.
• W2021000452 cites W2020286761 @default.
• W2021000452 cites W2032634683 @default.
• W2021000452 cites W2035454042 @default.
• W2021000452 cites W2116992531 @default.
• W2021000452 cites W2123210027 @default.
• W2021000452 cites W2148961769 @default.
• W2021000452 doi "https://doi.org/10.1063/1.1797564" @default.
• W2021000452 hasPublicationYear "2004" @default.
• W2021000452 type Work @default.
• W2021000452 sameAs 2021000452 @default.
• W2021000452 citedByCount "130" @default.
• W2021000452 countsByYear W20210004522012 @default.
• W2021000452 countsByYear W20210004522013 @default.
• W2021000452 countsByYear W20210004522014 @default.
• W2021000452 countsByYear W20210004522015 @default.
• W2021000452 countsByYear W20210004522016 @default.
• W2021000452 countsByYear W20210004522017 @default.
• W2021000452 countsByYear W20210004522018 @default.
• W2021000452 countsByYear W20210004522019 @default.
• W2021000452 countsByYear W20210004522020 @default.
• W2021000452 countsByYear W20210004522022 @default.
• W2021000452 crossrefType "journal-article" @default.
• W2021000452 hasAuthorship W2021000452A5028907255 @default.
• W2021000452 hasAuthorship W2021000452A5038313734 @default.
• W2021000452 hasAuthorship W2021000452A5065754731 @default.
• W2021000452 hasAuthorship W2021000452A5071603212 @default.
• W2021000452 hasAuthorship W2021000452A5087475048 @default.
• W2021000452 hasConcept C111368507 @default.
• W2021000452 hasConcept C113196181 @default.
• W2021000452 hasConcept C121332964 @default.
• W2021000452 hasConcept C127313418 @default.
• W2021000452 hasConcept C127413603 @default.
• W2021000452 hasConcept C133386390 @default.
• W2021000452 hasConcept C13862629 @default.
• W2021000452 hasConcept C171250308 @default.
• W2021000452 hasConcept C185592680 @default.
• W2021000452 hasConcept C191897082 @default.
• W2021000452 hasConcept C192562407 @default.
• W2021000452 hasConcept C2777289219 @default.
• W2021000452 hasConcept C2778836790 @default.
• W2021000452 hasConcept C2779227376 @default.
• W2021000452 hasConcept C2779851234 @default.
• W2021000452 hasConcept C42360764 @default.
• W2021000452 hasConcept C43617362 @default.
• W2021000452 hasConcept C49040817 @default.
• W2021000452 hasConcept C544153396 @default.
• W2021000452 hasConcept C59061564 @default.
• W2021000452 hasConcept C69357855 @default.
• W2021000452 hasConcept C69544855 @default.
• W2021000452 hasConcept C97355855 @default.
• W2021000452 hasConceptScore W2021000452C111368507 @default.
• W2021000452 hasConceptScore W2021000452C113196181 @default.
• W2021000452 hasConceptScore W2021000452C121332964 @default.
• W2021000452 hasConceptScore W2021000452C127313418 @default.
• W2021000452 hasConceptScore W2021000452C127413603 @default.
• W2021000452 hasConceptScore W2021000452C133386390 @default.
• W2021000452 hasConceptScore W2021000452C13862629 @default.
• W2021000452 hasConceptScore W2021000452C171250308 @default.
• W2021000452 hasConceptScore W2021000452C185592680 @default.
• W2021000452 hasConceptScore W2021000452C191897082 @default.
• W2021000452 hasConceptScore W2021000452C192562407 @default.
• W2021000452 hasConceptScore W2021000452C2777289219 @default.
• W2021000452 hasConceptScore W2021000452C2778836790 @default.
• W2021000452 hasConceptScore W2021000452C2779227376 @default.
• W2021000452 hasConceptScore W2021000452C2779851234 @default.
• W2021000452 hasConceptScore W2021000452C42360764 @default.
• W2021000452 hasConceptScore W2021000452C43617362 @default.
• W2021000452 hasConceptScore W2021000452C49040817 @default.
• W2021000452 hasConceptScore W2021000452C544153396 @default.
• W2021000452 hasConceptScore W2021000452C59061564 @default.
• W2021000452 hasConceptScore W2021000452C69357855 @default.
• W2021000452 hasConceptScore W2021000452C69544855 @default.
• W2021000452 hasConceptScore W2021000452C97355855 @default.
• W2021000452 hasIssue "14" @default.
• W2021000452 hasLocation W20210004521 @default.
• W2021000452 hasOpenAccess W2021000452 @default.
• W2021000452 hasPrimaryLocation W20210004521 @default.
• W2021000452 hasRelatedWork W113211108 @default.
• W2021000452 hasRelatedWork W1965207523 @default.
• W2021000452 hasRelatedWork W1969884964 @default.
• W2021000452 hasRelatedWork W1988501380 @default.
• W2021000452 hasRelatedWork W2050522316 @default.
• W2021000452 hasRelatedWork W2356119871 @default.
• W2021000452 hasRelatedWork W2356667153 @default.
• W2021000452 hasRelatedWork W2703393533 @default.

• next