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- W2021000710 abstract "We propose a novel measurement system based on a low coherence Michelson interferometer and six-axis hexapod platform to accurately measure structures with high aspect ratio using different tilt angles of the measured surface. In order to realize automatic measurement, the system is designed to automatically perform autofocusing, adjust the tilt angle of the test surface, make surface measurements, and merge the measurement data sets. Due to certain topography, e.g., structures with high aspect ratio, the interferometer cannot obtain enough reflected light to evaluate the height information in some areas of the test surface. For this reason, we developed a measurement system that uses measurements from different tilt angles of the test surface and stitching algorithms to realize a complete surface measurement data set. The performance of the proposed measurement system is evaluated experimentally and compared to the results of measurements using a perthometer." @default.
- W2021000710 created "2016-06-24" @default.
- W2021000710 creator A5000093771 @default.
- W2021000710 creator A5026859019 @default.
- W2021000710 creator A5052224154 @default.
- W2021000710 date "2015-02-11" @default.
- W2021000710 modified "2023-09-24" @default.
- W2021000710 title "High-precision surface measurement with an automated multiangle low coherence interferometer" @default.
- W2021000710 cites W1983568931 @default.
- W2021000710 cites W1999903193 @default.
- W2021000710 cites W2016182223 @default.
- W2021000710 cites W2020257733 @default.
- W2021000710 cites W2027512869 @default.
- W2021000710 cites W2052162725 @default.
- W2021000710 cites W2052260341 @default.
- W2021000710 cites W2055190311 @default.
- W2021000710 cites W2068563273 @default.
- W2021000710 cites W2083035905 @default.
- W2021000710 cites W2158562155 @default.
- W2021000710 cites W2167306329 @default.
- W2021000710 cites W4249911582 @default.
- W2021000710 cites W2146696548 @default.
- W2021000710 doi "https://doi.org/10.1364/ao.54.001232" @default.
- W2021000710 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/25968182" @default.
- W2021000710 hasPublicationYear "2015" @default.
- W2021000710 type Work @default.
- W2021000710 sameAs 2021000710 @default.
- W2021000710 citedByCount "2" @default.
- W2021000710 countsByYear W20210007102020 @default.
- W2021000710 countsByYear W20210007102021 @default.
- W2021000710 crossrefType "journal-article" @default.
- W2021000710 hasAuthorship W2021000710A5000093771 @default.
- W2021000710 hasAuthorship W2021000710A5026859019 @default.
- W2021000710 hasAuthorship W2021000710A5052224154 @default.
- W2021000710 hasConcept C120665830 @default.
- W2021000710 hasConcept C121332964 @default.
- W2021000710 hasConcept C1276947 @default.
- W2021000710 hasConcept C135339813 @default.
- W2021000710 hasConcept C166689943 @default.
- W2021000710 hasConcept C202799725 @default.
- W2021000710 hasConcept C23576306 @default.
- W2021000710 hasConcept C2524010 @default.
- W2021000710 hasConcept C2776904371 @default.
- W2021000710 hasConcept C2779844322 @default.
- W2021000710 hasConcept C2781181686 @default.
- W2021000710 hasConcept C29081049 @default.
- W2021000710 hasConcept C33923547 @default.
- W2021000710 hasConcept C37649242 @default.
- W2021000710 hasConcept C41008148 @default.
- W2021000710 hasConcept C520434653 @default.
- W2021000710 hasConcept C62520636 @default.
- W2021000710 hasConcept C9809166 @default.
- W2021000710 hasConceptScore W2021000710C120665830 @default.
- W2021000710 hasConceptScore W2021000710C121332964 @default.
- W2021000710 hasConceptScore W2021000710C1276947 @default.
- W2021000710 hasConceptScore W2021000710C135339813 @default.
- W2021000710 hasConceptScore W2021000710C166689943 @default.
- W2021000710 hasConceptScore W2021000710C202799725 @default.
- W2021000710 hasConceptScore W2021000710C23576306 @default.
- W2021000710 hasConceptScore W2021000710C2524010 @default.
- W2021000710 hasConceptScore W2021000710C2776904371 @default.
- W2021000710 hasConceptScore W2021000710C2779844322 @default.
- W2021000710 hasConceptScore W2021000710C2781181686 @default.
- W2021000710 hasConceptScore W2021000710C29081049 @default.
- W2021000710 hasConceptScore W2021000710C33923547 @default.
- W2021000710 hasConceptScore W2021000710C37649242 @default.
- W2021000710 hasConceptScore W2021000710C41008148 @default.
- W2021000710 hasConceptScore W2021000710C520434653 @default.
- W2021000710 hasConceptScore W2021000710C62520636 @default.
- W2021000710 hasConceptScore W2021000710C9809166 @default.
- W2021000710 hasFunder F4320320879 @default.
- W2021000710 hasLocation W20210007101 @default.
- W2021000710 hasLocation W20210007102 @default.
- W2021000710 hasOpenAccess W2021000710 @default.
- W2021000710 hasPrimaryLocation W20210007101 @default.
- W2021000710 hasRelatedWork W1963960320 @default.
- W2021000710 hasRelatedWork W1973865758 @default.
- W2021000710 hasRelatedWork W1992014850 @default.
- W2021000710 hasRelatedWork W2022846771 @default.
- W2021000710 hasRelatedWork W2033159588 @default.
- W2021000710 hasRelatedWork W2061924526 @default.
- W2021000710 hasRelatedWork W2062674860 @default.
- W2021000710 hasRelatedWork W2172065064 @default.
- W2021000710 hasRelatedWork W2321910427 @default.
- W2021000710 hasRelatedWork W2365288980 @default.
- W2021000710 hasRelatedWork W2368416767 @default.
- W2021000710 hasRelatedWork W2390655572 @default.
- W2021000710 hasRelatedWork W2391862256 @default.
- W2021000710 hasRelatedWork W250363672 @default.
- W2021000710 hasRelatedWork W2586844817 @default.
- W2021000710 hasRelatedWork W2796386643 @default.
- W2021000710 hasRelatedWork W2884466334 @default.
- W2021000710 hasRelatedWork W2996366593 @default.
- W2021000710 hasRelatedWork W3018770170 @default.
- W2021000710 hasRelatedWork W2740574666 @default.
- W2021000710 isParatext "false" @default.
- W2021000710 isRetracted "false" @default.
- W2021000710 magId "2021000710" @default.
- W2021000710 workType "article" @default.