Matches in SemOpenAlex for { <https://semopenalex.org/work/W2021036882> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W2021036882 endingPage "331" @default.
- W2021036882 startingPage "325" @default.
- W2021036882 abstract "Abstract A technique for fabrication of piezoresistive sensors in standard MEMS processes is introduced. The basic twin-beam structure comprises of a pair of beams from different structural layers and the structure is designed such that when one beam is under tension, the other one is under compression. If at least one of the beams is made of a piezoresistive material, it is possible to measure the change in the resistance of beams as a result of the applied stress by properly routing an electrical current through the structure. The proposed method does not require electrical isolation of piezoresistors from structural layers, and as confirmed by experiments, can be practically used for small deflections. Sample structures were fabricated in the MUMPs process and were employed to prove the validity of the design principle. Using the Maxwell–Mohr method, an analytic model is developed for the proposed structure and is verified by finite element simulations. Using modeling and experimental results, the piezoresistive coefficient of the top polysilicon layer in MUMPs process was calculated to be − 10.65 × 1 0 − 11 Pa−1. Having the proper structure, its model, and the piezoresistive coefficient of the material, it is now possible to design and optimize a wide variety of piezoresistive sensors such as accelerometers and magnetic field sensors in low-cost standard MEMS processes." @default.
- W2021036882 created "2016-06-24" @default.
- W2021036882 creator A5014284015 @default.
- W2021036882 creator A5055887692 @default.
- W2021036882 creator A5083452324 @default.
- W2021036882 date "2006-03-01" @default.
- W2021036882 modified "2023-10-01" @default.
- W2021036882 title "Piezoresistive sensing with twin-beam structures in standard MEMS foundry processes" @default.
- W2021036882 cites W1967428644 @default.
- W2021036882 cites W1975305774 @default.
- W2021036882 cites W2060123237 @default.
- W2021036882 cites W2115302362 @default.
- W2021036882 doi "https://doi.org/10.1016/j.sna.2005.12.034" @default.
- W2021036882 hasPublicationYear "2006" @default.
- W2021036882 type Work @default.
- W2021036882 sameAs 2021036882 @default.
- W2021036882 citedByCount "21" @default.
- W2021036882 countsByYear W20210368822012 @default.
- W2021036882 countsByYear W20210368822013 @default.
- W2021036882 countsByYear W20210368822014 @default.
- W2021036882 countsByYear W20210368822015 @default.
- W2021036882 countsByYear W20210368822017 @default.
- W2021036882 countsByYear W20210368822019 @default.
- W2021036882 countsByYear W20210368822020 @default.
- W2021036882 countsByYear W20210368822022 @default.
- W2021036882 crossrefType "journal-article" @default.
- W2021036882 hasAuthorship W2021036882A5014284015 @default.
- W2021036882 hasAuthorship W2021036882A5055887692 @default.
- W2021036882 hasAuthorship W2021036882A5083452324 @default.
- W2021036882 hasConcept C117671659 @default.
- W2021036882 hasConcept C119599485 @default.
- W2021036882 hasConcept C127413603 @default.
- W2021036882 hasConcept C168834538 @default.
- W2021036882 hasConcept C192562407 @default.
- W2021036882 hasConcept C198490522 @default.
- W2021036882 hasConcept C2781087836 @default.
- W2021036882 hasConcept C37977207 @default.
- W2021036882 hasConcept C49040817 @default.
- W2021036882 hasConcept C66938386 @default.
- W2021036882 hasConcept C78519656 @default.
- W2021036882 hasConceptScore W2021036882C117671659 @default.
- W2021036882 hasConceptScore W2021036882C119599485 @default.
- W2021036882 hasConceptScore W2021036882C127413603 @default.
- W2021036882 hasConceptScore W2021036882C168834538 @default.
- W2021036882 hasConceptScore W2021036882C192562407 @default.
- W2021036882 hasConceptScore W2021036882C198490522 @default.
- W2021036882 hasConceptScore W2021036882C2781087836 @default.
- W2021036882 hasConceptScore W2021036882C37977207 @default.
- W2021036882 hasConceptScore W2021036882C49040817 @default.
- W2021036882 hasConceptScore W2021036882C66938386 @default.
- W2021036882 hasConceptScore W2021036882C78519656 @default.
- W2021036882 hasIssue "2" @default.
- W2021036882 hasLocation W20210368821 @default.
- W2021036882 hasOpenAccess W2021036882 @default.
- W2021036882 hasPrimaryLocation W20210368821 @default.
- W2021036882 hasRelatedWork W1999468799 @default.
- W2021036882 hasRelatedWork W2021036882 @default.
- W2021036882 hasRelatedWork W2037606917 @default.
- W2021036882 hasRelatedWork W2276389091 @default.
- W2021036882 hasRelatedWork W2366712407 @default.
- W2021036882 hasRelatedWork W2746227384 @default.
- W2021036882 hasRelatedWork W2899084033 @default.
- W2021036882 hasRelatedWork W2983152603 @default.
- W2021036882 hasRelatedWork W3090406246 @default.
- W2021036882 hasRelatedWork W3189555941 @default.
- W2021036882 hasVolume "127" @default.
- W2021036882 isParatext "false" @default.
- W2021036882 isRetracted "false" @default.
- W2021036882 magId "2021036882" @default.
- W2021036882 workType "article" @default.