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- W2021062766 abstract "A review of recent efforts to develop photoresist materials and processes for 193-nm (ArF excimer laser) photolithography is reported. Three categories of resist processes are discussed: (1) single-layer resists based on acrylate polymers, (2) silicon-polymer bilayer resists, and (3) surface-imaged positive-tone silylation resist processes. To date, materials have been developed for each process which exhibit resolution to better than 0.20μm with sensitivities less than 50mJ/cm2." @default.
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- W2021062766 date "1993-01-01" @default.
- W2021062766 modified "2023-10-03" @default.
- W2021062766 title "Resist processes for ArF excimer laser lithography." @default.
- W2021062766 doi "https://doi.org/10.2494/photopolymer.6.473" @default.
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