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- W2021107616 abstract "Wavelength scanning interferometry allows the simultaneous measurement of the surface profile and the optical thickness variation of a parallel plate. However, it is necessary to evaluate the modulation frequencies of the signal and noise which depend on the optical thickness and dispersion of the test plate. New nineteen-sample, wavelength scanning algorithms allow variation in these parameters and give a measurement resolution of 1-2 nanometers rms. Measurement of a BK7 near-parallel plate of 250 mm diameter and 25 mm thickness was demonstrated in a Fizeau interferometer." @default.
- W2021107616 created "2016-06-24" @default.
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- W2021107616 date "2002-06-20" @default.
- W2021107616 modified "2023-10-07" @default.
- W2021107616 title "Improved algorithms for wavelength scanning interferometry: application to the simultaneous measurement of surface topography and optical thickness variation in a transparent parallel plate" @default.
- W2021107616 doi "https://doi.org/10.1117/12.472221" @default.
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