Matches in SemOpenAlex for { <https://semopenalex.org/work/W2021128162> ?p ?o ?g. }
- W2021128162 abstract "In this study, a molecular dynamics simulation method has been employed to investigate CF3 + ions, bombarding Si surface with the energy of 100, 200, 300 and 400 eV and an incident angle of 45 degrees with respect to the normal. The simulation results show that when CF3+ ions approach the Si surface they are broken up into small fragments. Some fragments deposit on the surface to form a “fluorocarbosilyl” layer. The erosion of Si is dominated by formation of SiF3 followed by SiF2 species and in minority species SiF." @default.
- W2021128162 created "2016-06-24" @default.
- W2021128162 creator A5012738481 @default.
- W2021128162 creator A5014821062 @default.
- W2021128162 creator A5022340179 @default.
- W2021128162 creator A5051955712 @default.
- W2021128162 creator A5057727325 @default.
- W2021128162 creator A5062790546 @default.
- W2021128162 creator A5071878141 @default.
- W2021128162 creator A5087374783 @default.
- W2021128162 date "2012-02-01" @default.
- W2021128162 modified "2023-09-25" @default.
- W2021128162 title "CF3+ etching silicon surface: A molecular dynamics study" @default.
- W2021128162 cites W1585632821 @default.
- W2021128162 cites W1625659111 @default.
- W2021128162 cites W1638630680 @default.
- W2021128162 cites W1965148421 @default.
- W2021128162 cites W1971454456 @default.
- W2021128162 cites W1978258110 @default.
- W2021128162 cites W1979296236 @default.
- W2021128162 cites W1984087433 @default.
- W2021128162 cites W1990310391 @default.
- W2021128162 cites W2002676026 @default.
- W2021128162 cites W2010807491 @default.
- W2021128162 cites W2014713921 @default.
- W2021128162 cites W2021309625 @default.
- W2021128162 cites W2023616054 @default.
- W2021128162 cites W2023723913 @default.
- W2021128162 cites W2034592349 @default.
- W2021128162 cites W2035266068 @default.
- W2021128162 cites W2039959185 @default.
- W2021128162 cites W2053156680 @default.
- W2021128162 cites W2070767331 @default.
- W2021128162 cites W2082389942 @default.
- W2021128162 doi "https://doi.org/10.1016/j.vacuum.2011.06.003" @default.
- W2021128162 hasPublicationYear "2012" @default.
- W2021128162 type Work @default.
- W2021128162 sameAs 2021128162 @default.
- W2021128162 citedByCount "1" @default.
- W2021128162 countsByYear W20211281622014 @default.
- W2021128162 crossrefType "journal-article" @default.
- W2021128162 hasAuthorship W2021128162A5012738481 @default.
- W2021128162 hasAuthorship W2021128162A5014821062 @default.
- W2021128162 hasAuthorship W2021128162A5022340179 @default.
- W2021128162 hasAuthorship W2021128162A5051955712 @default.
- W2021128162 hasAuthorship W2021128162A5057727325 @default.
- W2021128162 hasAuthorship W2021128162A5062790546 @default.
- W2021128162 hasAuthorship W2021128162A5071878141 @default.
- W2021128162 hasAuthorship W2021128162A5087374783 @default.
- W2021128162 hasConcept C100460472 @default.
- W2021128162 hasConcept C121332964 @default.
- W2021128162 hasConcept C123157820 @default.
- W2021128162 hasConcept C127313418 @default.
- W2021128162 hasConcept C145148216 @default.
- W2021128162 hasConcept C147597530 @default.
- W2021128162 hasConcept C151730666 @default.
- W2021128162 hasConcept C159467904 @default.
- W2021128162 hasConcept C171250308 @default.
- W2021128162 hasConcept C178790620 @default.
- W2021128162 hasConcept C184779094 @default.
- W2021128162 hasConcept C185544564 @default.
- W2021128162 hasConcept C185592680 @default.
- W2021128162 hasConcept C192562407 @default.
- W2021128162 hasConcept C2524010 @default.
- W2021128162 hasConcept C2776799497 @default.
- W2021128162 hasConcept C2779227376 @default.
- W2021128162 hasConcept C33923547 @default.
- W2021128162 hasConcept C41999313 @default.
- W2021128162 hasConcept C49040817 @default.
- W2021128162 hasConcept C544956773 @default.
- W2021128162 hasConcept C59593255 @default.
- W2021128162 hasConcept C82706917 @default.
- W2021128162 hasConceptScore W2021128162C100460472 @default.
- W2021128162 hasConceptScore W2021128162C121332964 @default.
- W2021128162 hasConceptScore W2021128162C123157820 @default.
- W2021128162 hasConceptScore W2021128162C127313418 @default.
- W2021128162 hasConceptScore W2021128162C145148216 @default.
- W2021128162 hasConceptScore W2021128162C147597530 @default.
- W2021128162 hasConceptScore W2021128162C151730666 @default.
- W2021128162 hasConceptScore W2021128162C159467904 @default.
- W2021128162 hasConceptScore W2021128162C171250308 @default.
- W2021128162 hasConceptScore W2021128162C178790620 @default.
- W2021128162 hasConceptScore W2021128162C184779094 @default.
- W2021128162 hasConceptScore W2021128162C185544564 @default.
- W2021128162 hasConceptScore W2021128162C185592680 @default.
- W2021128162 hasConceptScore W2021128162C192562407 @default.
- W2021128162 hasConceptScore W2021128162C2524010 @default.
- W2021128162 hasConceptScore W2021128162C2776799497 @default.
- W2021128162 hasConceptScore W2021128162C2779227376 @default.
- W2021128162 hasConceptScore W2021128162C33923547 @default.
- W2021128162 hasConceptScore W2021128162C41999313 @default.
- W2021128162 hasConceptScore W2021128162C49040817 @default.
- W2021128162 hasConceptScore W2021128162C544956773 @default.
- W2021128162 hasConceptScore W2021128162C59593255 @default.
- W2021128162 hasConceptScore W2021128162C82706917 @default.
- W2021128162 hasLocation W20211281621 @default.
- W2021128162 hasOpenAccess W2021128162 @default.
- W2021128162 hasPrimaryLocation W20211281621 @default.
- W2021128162 hasRelatedWork W1568378302 @default.
- W2021128162 hasRelatedWork W1965337111 @default.