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- W2021190744 abstract "The formation of the denuded zone (DZ) in Czochralski silicon preannealed under high pressure was systematically investigated. It was found that the DZ could not form in those specimens. It is considered that the oxygen precipitates generated during preannealing under high pressure are more stable than those grown under atmosphere, so that the oxygen precipitates in the region close to the surface area could not dissociate at the first high-temperature annealing of intrinsic gettering (IG), but grew during the subsequent IG process. The results were also confirmed by the experiments of transmission electron microscopy." @default.
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- W2021190744 date "2003-12-01" @default.
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- W2021190744 title "Oxygen precipitation kinetics of Czochralski silicon preannealed under high pressure" @default.
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- W2021190744 doi "https://doi.org/10.1016/j.physb.2003.09.116" @default.
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