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• W2021190986 startingPage "2167" @default.
• W2021190986 abstract "Probe tips for scanning tunneling microscopy have been sharpened using focused ion beam milling. Reproducible tips were formed on polycrystalline W and Pt-Ir shanks, but this technique is not limited to these materials. The tips were found to have cone angles of 12±3° and radii of curvature as sharp as 4 nm. Focused ion beam machining allows precise control of the final shape of the tips which is important in metrology measurements of various nanostructure devices." @default.
• W2021190986 created "2016-06-24" @default.
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• W2021190986 date "1991-09-01" @default.
• W2021190986 modified "2023-09-30" @default.
• W2021190986 title "Scanning probe tips formed by focused ion beams" @default.
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• W2021190986 doi "https://doi.org/10.1063/1.1142334" @default.
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