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- W2021195079 abstract "In micro manufacturing (MEMS, polymer hot-embossing, polymer roll-to-roll imprint, etc.) precise micro and nano-sizedfeatures are distributed over large areas. In order to inspect for defects or employ statistical process control onmicromanufactured parts, metrological instruments must collect data with submicron resolution at a rate fast enough tokeep up with the pace of production. Commercial inspection instruments fall short on meeting these challengingdemands. In this paper we detail the design, implementation, and results of an optical system build to provide real-timeinspection for transparent polymer microfluidic devices. Our current hardware demonstrates 0.5 micron lateralresolution with 1 micron vertical resolution at a rate of 640,000 voxels per second. Furthermore we demonstrate theability to measure vertical sidewalls. The tilted orientation of our camera system provides access to these typicallyhidden or eclipsed areas. We conclude the paper with a direct comparison of our instrument's capabilities against awhite light interferometer and laser scanning profilometer. The data demonstrates the difference between theinstruments' lateral and vertical resolution, data acquisition rate, and vertical sidewall measurement capabilities." @default.
- W2021195079 created "2016-06-24" @default.
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- W2021195079 date "2011-05-23" @default.
- W2021195079 modified "2023-09-27" @default.
- W2021195079 title "3D high-speed profilometer for inspection of micro-manufactured transparent parts" @default.
- W2021195079 doi "https://doi.org/10.1117/12.889564" @default.
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