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- W2021197774 abstract "A new technology was developed to detect Critical Dimension (CD) variations in a Fourier space. The detectionprinciple is a form birefringence of the wafer. Utilizing this principle, CD and Pattern Edge Roughness (PER) variationsare detected as a polarization fluctuation and converted into light intensity. We have achieved high resolution and highsensitivity by combining a form birefringence with a novel optical system. This system detects the light intensity in aFourier space with a high NA objective, enabling the detection of various lights with different incident angles andpolarization states at a time. We have confirmed through simulations that this system has high sensitivity toward CDvariations. Furthermore, in partnership with Toshiba Corporation, and through the evaluation of wafers fabricated atToshiba, we conclude that the light intensity detected by the new system strongly correlates with CD values, and that thenew system is capable of detecting CD variations in sufficient sensitivity." @default.
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- W2021197774 date "2008-03-14" @default.
- W2021197774 modified "2023-09-23" @default.
- W2021197774 title "Novel CD inspection technology leveraging a form birefringence in a Fourier space" @default.
- W2021197774 doi "https://doi.org/10.1117/12.771889" @default.
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