Matches in SemOpenAlex for { <https://semopenalex.org/work/W2021304907> ?p ?o ?g. }
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- W2021304907 endingPage "F98" @default.
- W2021304907 startingPage "F98" @default.
- W2021304907 abstract "The influence of fictive temperature on the polishing characteristics of amorphous silicon dioxide films was studied. Amorphous materials, in general, can have different properties depending upon their thermal history, and this is attributed to a difference in their fictive temperature, the temperature at which the supercooled liquid structure freezes into a glass. Amorphous silicon dioxide films ca. 2 μm thick, were prepared by wet thermal oxidation, dried, and then heat-treated to have different fictive temperatures. Indentation testing of similarly heat-treated silica glasses, done using nanoindentation and a Knoop microhardness indenter, showed that the glass with a higher fictive temperature had a higher hardness. On the other hand, the chemical etch rate in dilute hydrofluoric acid was faster for the silica glass with the higher fictive temperature. Polishing of the silicon dioxide films using cerium oxide slurry under identical conditions showed that the polishing rate was higher for the oxide films with a lower fictive temperature. Hence, it was suggested that the mechanical properties of the glass were more important than chemical properties in controlling the polishing behavior of amorphous silicon dioxide. © 2001 The Electrochemical Society. All rights reserved." @default.
- W2021304907 created "2016-06-24" @default.
- W2021304907 creator A5005421222 @default.
- W2021304907 creator A5075801275 @default.
- W2021304907 date "2001-01-01" @default.
- W2021304907 modified "2023-10-17" @default.
- W2021304907 title "Effect of Fictive Temperature on the Polishing Rate of Thermally Grown Silicon Dioxide" @default.
- W2021304907 cites W1972207333 @default.
- W2021304907 cites W1976131027 @default.
- W2021304907 cites W1984951859 @default.
- W2021304907 cites W1995203573 @default.
- W2021304907 cites W2020452254 @default.
- W2021304907 cites W2022397311 @default.
- W2021304907 cites W2039522415 @default.
- W2021304907 cites W2071938585 @default.
- W2021304907 cites W2086945240 @default.
- W2021304907 cites W2091989934 @default.
- W2021304907 cites W2103423679 @default.
- W2021304907 cites W2128458777 @default.
- W2021304907 cites W2138103254 @default.
- W2021304907 cites W2157295492 @default.
- W2021304907 cites W2171049006 @default.
- W2021304907 cites W2328104130 @default.
- W2021304907 doi "https://doi.org/10.1149/1.1366628" @default.
- W2021304907 hasPublicationYear "2001" @default.
- W2021304907 type Work @default.
- W2021304907 sameAs 2021304907 @default.
- W2021304907 citedByCount "9" @default.
- W2021304907 countsByYear W20213049072020 @default.
- W2021304907 crossrefType "journal-article" @default.
- W2021304907 hasAuthorship W2021304907A5005421222 @default.
- W2021304907 hasAuthorship W2021304907A5075801275 @default.
- W2021304907 hasConcept C122865956 @default.
- W2021304907 hasConcept C127413603 @default.
- W2021304907 hasConcept C138113353 @default.
- W2021304907 hasConcept C159985019 @default.
- W2021304907 hasConcept C165720898 @default.
- W2021304907 hasConcept C184498911 @default.
- W2021304907 hasConcept C185592680 @default.
- W2021304907 hasConcept C191897082 @default.
- W2021304907 hasConcept C192562407 @default.
- W2021304907 hasConcept C2779089622 @default.
- W2021304907 hasConcept C42360764 @default.
- W2021304907 hasConcept C521977710 @default.
- W2021304907 hasConcept C544956773 @default.
- W2021304907 hasConcept C56052488 @default.
- W2021304907 hasConcept C8010536 @default.
- W2021304907 hasConcept C87976508 @default.
- W2021304907 hasConceptScore W2021304907C122865956 @default.
- W2021304907 hasConceptScore W2021304907C127413603 @default.
- W2021304907 hasConceptScore W2021304907C138113353 @default.
- W2021304907 hasConceptScore W2021304907C159985019 @default.
- W2021304907 hasConceptScore W2021304907C165720898 @default.
- W2021304907 hasConceptScore W2021304907C184498911 @default.
- W2021304907 hasConceptScore W2021304907C185592680 @default.
- W2021304907 hasConceptScore W2021304907C191897082 @default.
- W2021304907 hasConceptScore W2021304907C192562407 @default.
- W2021304907 hasConceptScore W2021304907C2779089622 @default.
- W2021304907 hasConceptScore W2021304907C42360764 @default.
- W2021304907 hasConceptScore W2021304907C521977710 @default.
- W2021304907 hasConceptScore W2021304907C544956773 @default.
- W2021304907 hasConceptScore W2021304907C56052488 @default.
- W2021304907 hasConceptScore W2021304907C8010536 @default.
- W2021304907 hasConceptScore W2021304907C87976508 @default.
- W2021304907 hasIssue "5" @default.
- W2021304907 hasLocation W20213049071 @default.
- W2021304907 hasOpenAccess W2021304907 @default.
- W2021304907 hasPrimaryLocation W20213049071 @default.
- W2021304907 hasRelatedWork W1580007101 @default.
- W2021304907 hasRelatedWork W1969814548 @default.
- W2021304907 hasRelatedWork W2073991869 @default.
- W2021304907 hasRelatedWork W2079132442 @default.
- W2021304907 hasRelatedWork W2084089923 @default.
- W2021304907 hasRelatedWork W228135380 @default.
- W2021304907 hasRelatedWork W2617703085 @default.
- W2021304907 hasRelatedWork W2769832677 @default.
- W2021304907 hasRelatedWork W31806492 @default.
- W2021304907 hasRelatedWork W908460589 @default.
- W2021304907 hasVolume "148" @default.
- W2021304907 isParatext "false" @default.
- W2021304907 isRetracted "false" @default.
- W2021304907 magId "2021304907" @default.
- W2021304907 workType "article" @default.