Matches in SemOpenAlex for { <https://semopenalex.org/work/W2021308414> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2021308414 endingPage "G77" @default.
- W2021308414 startingPage "G77" @default.
- W2021308414 abstract "HfO 2 thin films with thickness between 2 and 20 nm were grown by liquid injection metallorganic chemical vapor deposition, LI-MOCVD, on SiO x /Si(100) substrates. Different mononuclear precursors ([Hf(OPr i ) 2 (tbaoac) 2 ], [Hf(NEt 2 ) 2 (guanid) 2 ], and [Hf(OBu t ) 2 (dmae) 2 ] were tested in combination with different solvents. Growth rate, surface morphology, crystal structure, and crystal density of the as-deposited films were analyzed as a function of deposition temperature. The influence of postdeposition annealing on the densification and crystallization was studied. Correlation of the structural properties with the electrical properties of metal insulator semiconductor capacitors with Pt top electrodes is discussed. Fully silicided metal gate stacks are additionally discussed for selected samples." @default.
- W2021308414 created "2016-06-24" @default.
- W2021308414 creator A5006258553 @default.
- W2021308414 creator A5008218756 @default.
- W2021308414 creator A5029711257 @default.
- W2021308414 creator A5037112345 @default.
- W2021308414 creator A5039416437 @default.
- W2021308414 creator A5045981077 @default.
- W2021308414 creator A5052798324 @default.
- W2021308414 creator A5063246558 @default.
- W2021308414 creator A5063319647 @default.
- W2021308414 date "2007-01-01" @default.
- W2021308414 modified "2023-09-28" @default.
- W2021308414 title "Thin Films of HfO[sub 2] for High-k Gate Oxide Applications from Engineered Alkoxide- and Amide-Based MOCVD Precursors" @default.
- W2021308414 cites W2003645630 @default.
- W2021308414 cites W2009784477 @default.
- W2021308414 cites W2017694779 @default.
- W2021308414 cites W2025230095 @default.
- W2021308414 cites W2042587713 @default.
- W2021308414 cites W2070871477 @default.
- W2021308414 cites W2073855249 @default.
- W2021308414 cites W2077770884 @default.
- W2021308414 cites W2083036624 @default.
- W2021308414 cites W2084196976 @default.
- W2021308414 cites W2086190855 @default.
- W2021308414 cites W2141429398 @default.
- W2021308414 cites W2144526177 @default.
- W2021308414 cites W2144802462 @default.
- W2021308414 cites W2255449742 @default.
- W2021308414 doi "https://doi.org/10.1149/1.2431324" @default.
- W2021308414 hasPublicationYear "2007" @default.
- W2021308414 type Work @default.
- W2021308414 sameAs 2021308414 @default.
- W2021308414 citedByCount "25" @default.
- W2021308414 countsByYear W20213084142012 @default.
- W2021308414 countsByYear W20213084142013 @default.
- W2021308414 countsByYear W20213084142017 @default.
- W2021308414 countsByYear W20213084142018 @default.
- W2021308414 countsByYear W20213084142021 @default.
- W2021308414 crossrefType "journal-article" @default.
- W2021308414 hasAuthorship W2021308414A5006258553 @default.
- W2021308414 hasAuthorship W2021308414A5008218756 @default.
- W2021308414 hasAuthorship W2021308414A5029711257 @default.
- W2021308414 hasAuthorship W2021308414A5037112345 @default.
- W2021308414 hasAuthorship W2021308414A5039416437 @default.
- W2021308414 hasAuthorship W2021308414A5045981077 @default.
- W2021308414 hasAuthorship W2021308414A5052798324 @default.
- W2021308414 hasAuthorship W2021308414A5063246558 @default.
- W2021308414 hasAuthorship W2021308414A5063319647 @default.
- W2021308414 hasConcept C110738630 @default.
- W2021308414 hasConcept C127413603 @default.
- W2021308414 hasConcept C161790260 @default.
- W2021308414 hasConcept C171250308 @default.
- W2021308414 hasConcept C175665537 @default.
- W2021308414 hasConcept C178790620 @default.
- W2021308414 hasConcept C185592680 @default.
- W2021308414 hasConcept C19067145 @default.
- W2021308414 hasConcept C191897082 @default.
- W2021308414 hasConcept C192562407 @default.
- W2021308414 hasConcept C2778839380 @default.
- W2021308414 hasConcept C2779227376 @default.
- W2021308414 hasConcept C2779851234 @default.
- W2021308414 hasConcept C42360764 @default.
- W2021308414 hasConcept C49040817 @default.
- W2021308414 hasConceptScore W2021308414C110738630 @default.
- W2021308414 hasConceptScore W2021308414C127413603 @default.
- W2021308414 hasConceptScore W2021308414C161790260 @default.
- W2021308414 hasConceptScore W2021308414C171250308 @default.
- W2021308414 hasConceptScore W2021308414C175665537 @default.
- W2021308414 hasConceptScore W2021308414C178790620 @default.
- W2021308414 hasConceptScore W2021308414C185592680 @default.
- W2021308414 hasConceptScore W2021308414C19067145 @default.
- W2021308414 hasConceptScore W2021308414C191897082 @default.
- W2021308414 hasConceptScore W2021308414C192562407 @default.
- W2021308414 hasConceptScore W2021308414C2778839380 @default.
- W2021308414 hasConceptScore W2021308414C2779227376 @default.
- W2021308414 hasConceptScore W2021308414C2779851234 @default.
- W2021308414 hasConceptScore W2021308414C42360764 @default.
- W2021308414 hasConceptScore W2021308414C49040817 @default.
- W2021308414 hasIssue "3" @default.
- W2021308414 hasLocation W20213084141 @default.
- W2021308414 hasOpenAccess W2021308414 @default.
- W2021308414 hasPrimaryLocation W20213084141 @default.
- W2021308414 hasRelatedWork W1969330179 @default.
- W2021308414 hasRelatedWork W2020567181 @default.
- W2021308414 hasRelatedWork W2066568999 @default.
- W2021308414 hasRelatedWork W2133362073 @default.
- W2021308414 hasRelatedWork W2150801153 @default.
- W2021308414 hasRelatedWork W2319084653 @default.
- W2021308414 hasRelatedWork W2350253508 @default.
- W2021308414 hasRelatedWork W2354568948 @default.
- W2021308414 hasRelatedWork W2362888512 @default.
- W2021308414 hasRelatedWork W2371878292 @default.
- W2021308414 hasVolume "154" @default.
- W2021308414 isParatext "false" @default.
- W2021308414 isRetracted "false" @default.
- W2021308414 magId "2021308414" @default.
- W2021308414 workType "article" @default.