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• W2021497799 abstract "Abstract In this article, the effect of the oxygen flow rate on the structure and properties of reactively sputtered Ti–B–O films are investigated. At low oxygen flow rate, the films are nanocomposite coatings: TiB 2 nanograins embedded in amorphous titanium and boron oxides. For higher values of the oxygen flow rate, the films are composed of amorphous titanium and boron oxides. Introduction of oxygen in titanium-boron based coatings induces an increase of their electrical resistivity. The thermal behaviour of the film's resistance is measured using a two-probe configuration. TiB 2 films exhibit a linear dependence of the electrical resistance with temperature that is characteristic of the metallic properties of TiB 2 . On the other hand, the temperature dependence of the electrical resistance of the nanocomposite Ti–B–O coatings does not match with metallic or semiconducting behaviour. High resolution UV photoemission spectroscopy results show a strong decrease of the Ti-3d states density at the Fermi level as a function of the oxygen flow rate, which is characteristic of a metal-insulator transition in Ti–B–O films. If the oxygen concentration in the films increases, the coatings become more and more transparent in the visible region due to the occurrence of the amorphous phase. The refractive index of amorphous films is also determined. Finally, the reduction of the film's hardness with the increase of the oxygen flow rate is discussed in connection with the film structure." @default.
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• W2021497799 date "2003-09-01" @default.
• W2021497799 modified "2023-10-18" @default.
• W2021497799 title "Influence of the oxygen flow rate on the properties of reactively sputtered Ti–B–O films" @default.
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• W2021497799 doi "https://doi.org/10.1016/s0257-8972(03)00567-x" @default.
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