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• W2021543957 abstract "Lanthanum hexaboride was coated on the wall surface of the vacuum vessel by magnetron sputtering, and the characteristics of pumping down of the coated vessel were investigated by comparing with those of the titanium nitride coated vacuum vessel. Right after the sputter deposition, both vacuum vessels were evacuated in the same way and the effective pumping speed of those surfaces was estimated to be about 4 m 3 /(m 2 s) for water vapor. These thin films also formed the low outgassing surface, and consequently, after the exposure of the coated vessel to air, the pressure of the vessel decreased by less than 1 3 of that before coating. The outgassing rate of lanthanum hexaboride coated surface was about five times larger than that of the titanium nitride coated surface at a time after 100 min from the start of evacuation. The XPS measurement showed that much oxygen was used in both films." @default.
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• W2021543957 date "1996-06-01" @default.
• W2021543957 modified "2023-09-25" @default.
• W2021543957 title "Pumping down characteristics of LaB6 and TiN coated vacuum vessels prepared by magnetron sputtering" @default.
• W2021543957 cites W1977498007 @default.
• W2021543957 cites W2095370726 @default.
• W2021543957 doi "https://doi.org/10.1016/0042-207x(96)00040-1" @default.
• W2021543957 hasPublicationYear "1996" @default.
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