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- W2021554534 abstract "This paper reports a miniature optical coherence tomography (OCT) probe and high-resolution 3D OCT imaging results obtained with this probe. The probe is only 2.8-mm in diameter, enabled by a unique high-fill-factor electrothermal MEMS mirror with hidden actuators and a novel wire-bonding-free (WBF) packaging technique. The MEMS mirror has a large mirror aperture of 1 mm with a chip size of only 1.55×1.7×0.5 mm3. The fabricated device achieves large 2-D scan optical angles up to 46° at only 4.8 V. High-resolution 3D OCT imaging results are also demonstrated using this assembled probe." @default.
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- W2021554534 date "2011-01-01" @default.
- W2021554534 modified "2023-09-22" @default.
- W2021554534 title "A 2.8-MM imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography" @default.
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- W2021554534 doi "https://doi.org/10.1109/memsys.2011.5734355" @default.
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