FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2021567453> ?p ?o ?g. }

• W2021567453 endingPage "294" @default.
• W2021567453 startingPage "286" @default.
• W2021567453 abstract "The present work reports a study on the dependence of the properties of ion beam sputter deposited (IBSD) tungsten on silicon upon energy and mass effects of primary ions. Properties of thin W films (t = 100–3000 Å) such as morphology (SEM), microstructure (XRD), impurity content (RBS) and resistivity were investigated. XRD patterns exhibit only the bcc α-W whatever the experimental parameters. The use of xenon leads to the best electrical characteristics; in this case resistivity depends weakly on incident ion energy and its variation versus thickness is rather well described in terms of a grain boundary scattering mechanism, whereas layers obtained with argon exhibit higher resistivities, which strongly depend on ion energy. We show that back-scattered ions from the target can account for the observed argon content. The more efficient electron-scattering centers appear to be argon atoms embedded in the growing film. This explanation agrees fairly well with results we obtained for DC magnetron sputter deposition and post deposition 45 keV Ar+ implantation." @default.
• W2021567453 created "2016-06-24" @default.
• W2021567453 creator A5034834381 @default.
• W2021567453 creator A5037925984 @default.
• W2021567453 creator A5052574734 @default.
• W2021567453 creator A5063715641 @default.
• W2021567453 creator A5070792787 @default.
• W2021567453 creator A5084613940 @default.
• W2021567453 date "1989-09-01" @default.
• W2021567453 modified "2023-09-27" @default.
• W2021567453 title "Ion beam sputtering deposition of tungsten: Energy and mass effects of primary ions" @default.
• W2021567453 cites W1966412514 @default.
• W2021567453 cites W1981554517 @default.
• W2021567453 cites W1984990932 @default.
• W2021567453 cites W1987806742 @default.
• W2021567453 cites W2003306134 @default.
• W2021567453 cites W2014951612 @default.
• W2021567453 cites W2024237144 @default.
• W2021567453 cites W2027162962 @default.
• W2021567453 cites W2031071676 @default.
• W2021567453 cites W2042259413 @default.
• W2021567453 cites W2054069898 @default.
• W2021567453 cites W2056968486 @default.
• W2021567453 cites W2069377610 @default.
• W2021567453 cites W2088047495 @default.
• W2021567453 cites W2094994265 @default.
• W2021567453 cites W2103184452 @default.
• W2021567453 cites W2171568487 @default.
• W2021567453 cites W2073120298 @default.
• W2021567453 doi "https://doi.org/10.1016/0169-4332(89)90549-7" @default.
• W2021567453 hasPublicationYear "1989" @default.
• W2021567453 type Work @default.
• W2021567453 sameAs 2021567453 @default.
• W2021567453 citedByCount "21" @default.
• W2021567453 countsByYear W20215674532017 @default.
• W2021567453 countsByYear W20215674532019 @default.
• W2021567453 crossrefType "journal-article" @default.
• W2021567453 hasAuthorship W2021567453A5034834381 @default.
• W2021567453 hasAuthorship W2021567453A5037925984 @default.
• W2021567453 hasAuthorship W2021567453A5052574734 @default.
• W2021567453 hasAuthorship W2021567453A5063715641 @default.
• W2021567453 hasAuthorship W2021567453A5070792787 @default.
• W2021567453 hasAuthorship W2021567453A5084613940 @default.
• W2021567453 hasConcept C113196181 @default.
• W2021567453 hasConcept C120665830 @default.
• W2021567453 hasConcept C121332964 @default.
• W2021567453 hasConcept C145148216 @default.
• W2021567453 hasConcept C151730666 @default.
• W2021567453 hasConcept C171250308 @default.
• W2021567453 hasConcept C178790620 @default.
• W2021567453 hasConcept C184779094 @default.
• W2021567453 hasConcept C185592680 @default.
• W2021567453 hasConcept C19067145 @default.
• W2021567453 hasConcept C191486275 @default.
• W2021567453 hasConcept C191897082 @default.
• W2021567453 hasConcept C192562407 @default.
• W2021567453 hasConcept C22423302 @default.
• W2021567453 hasConcept C2816523 @default.
• W2021567453 hasConcept C43617362 @default.
• W2021567453 hasConcept C50774322 @default.
• W2021567453 hasConcept C542268612 @default.
• W2021567453 hasConcept C544956773 @default.
• W2021567453 hasConcept C547737533 @default.
• W2021567453 hasConcept C548442186 @default.
• W2021567453 hasConcept C61427134 @default.
• W2021567453 hasConcept C62520636 @default.
• W2021567453 hasConcept C64297162 @default.
• W2021567453 hasConcept C69990965 @default.
• W2021567453 hasConcept C86803240 @default.
• W2021567453 hasConceptScore W2021567453C113196181 @default.
• W2021567453 hasConceptScore W2021567453C120665830 @default.
• W2021567453 hasConceptScore W2021567453C121332964 @default.
• W2021567453 hasConceptScore W2021567453C145148216 @default.
• W2021567453 hasConceptScore W2021567453C151730666 @default.
• W2021567453 hasConceptScore W2021567453C171250308 @default.
• W2021567453 hasConceptScore W2021567453C178790620 @default.
• W2021567453 hasConceptScore W2021567453C184779094 @default.
• W2021567453 hasConceptScore W2021567453C185592680 @default.
• W2021567453 hasConceptScore W2021567453C19067145 @default.
• W2021567453 hasConceptScore W2021567453C191486275 @default.
• W2021567453 hasConceptScore W2021567453C191897082 @default.
• W2021567453 hasConceptScore W2021567453C192562407 @default.
• W2021567453 hasConceptScore W2021567453C22423302 @default.
• W2021567453 hasConceptScore W2021567453C2816523 @default.
• W2021567453 hasConceptScore W2021567453C43617362 @default.
• W2021567453 hasConceptScore W2021567453C50774322 @default.
• W2021567453 hasConceptScore W2021567453C542268612 @default.
• W2021567453 hasConceptScore W2021567453C544956773 @default.
• W2021567453 hasConceptScore W2021567453C547737533 @default.
• W2021567453 hasConceptScore W2021567453C548442186 @default.
• W2021567453 hasConceptScore W2021567453C61427134 @default.
• W2021567453 hasConceptScore W2021567453C62520636 @default.
• W2021567453 hasConceptScore W2021567453C64297162 @default.
• W2021567453 hasConceptScore W2021567453C69990965 @default.
• W2021567453 hasConceptScore W2021567453C86803240 @default.
• W2021567453 hasIssue "1-4" @default.
• W2021567453 hasLocation W20215674531 @default.
• W2021567453 hasOpenAccess W2021567453 @default.

• next