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• W2021591608 startingPage "325304" @default.
• W2021591608 abstract "Ga diffusion from focused ion beam (FIB) milled grooves has been studied using x-ray photoemission electron microscopy (XPEEM) and mirror electron microscopy (MEM). We analyze the surface chemistry of the FIB structures measuring the Ga presence in the top layers of the milled grooves and morphological defects inside the grooves. The Ga is initially strictly confined to the grooves. However, annealing at temperatures as low as 150 °C leads to rapid and significant Ga surface diffusion from the FIB structures. The out-diffused Ga forms a thin layer extending up to several microns laterally in a non-regular pattern. The diffusion is significantly enhanced at small crystallites at the edges of the grooves. We explain the general behavior with an atomic scale model in which interstitial Ga in the milled areas diffuses out and substitutes silanol groups on the surface." @default.
• W2021591608 created "2016-06-24" @default.
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• W2021591608 date "2009-07-21" @default.
• W2021591608 modified "2023-10-16" @default.
• W2021591608 title "Low temperature Ga surface diffusion from focused ion beam milled grooves" @default.
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• W2021591608 doi "https://doi.org/10.1088/0957-4484/20/32/325304" @default.
• W2021591608 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/19620748" @default.
• W2021591608 hasPublicationYear "2009" @default.
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